This work demonstrates techniques that advance the standard practice in spindle metrology and enable five degree-of-freedom calibration of precision spindles with nanometer-level error motion. Several improvements are described in this paper: (1) an improved implementation of Donaldson and Estler reversal that eliminates moving and realigning the displacement sensor, (2) frequency domain low-pass filtering of data to remove spectral content without distortion, (3) robust removal of low frequency components caused by thermal drift and fluctuations in air bearing supply pressure, and (4) three-dimensional display of the synchronous error motion in the radial and axial directions. Example measurements demonstrate the repeatability and reproducibility of the techniques. Furthermore, synchronous radial error motion of an air bearing spindle calibrated by multi-step, master artifact, and master axis techniques agree within 1 nm.
A prototype spindle for low-force, low-speed applications that is kinematically constrained in accordance with the principles of exact constraint was designed, fabricated, and tested. In the prototype spindle, the position and orientation of the shaft (rotor) are constrained at five contact points; four constraints are arranged radially around the rotor, and one constraint is located at the end of the rotor. This paper describes the design of the prototype spindle and presents a study of its error motion for the hardened steel rotor sliding on brass and UHMW-PE bonded to ceramic. The error motion is observed to be highly repeatable with less than 100 nm asynchronous errors, and a simple analytical model enables the prediction of the synchronous error motion using measurements of the rotor's roundness profiles.
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