Error motion of a kinematic spindle

Hii, King Fu; Vallance, R. Ryan; Grejda, Robert D.; Marsh, Eric Russell

doi:10.1016/j.precisioneng.2003.11.001

Cited by 20 publications

(12 citation statements)

References 8 publications

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“…As shown in Equation 6.56, the spindle error e spindle (z, ) at the position z can be expressed as the superposition of infinite series of periodic functions [22]:…”

Section: Error Separation Methods For Slide Straightness Measurementmentioning

confidence: 99%

“… 22,. characteristics of the profile errors of regions A, B, C … along the circumference direction should be similar, and the evaluation result of one of these regions is representative of the others as well.…”

mentioning

confidence: 99%

“…22 shows a photograph of the measurement system composed of the AFM probe unit and XY-scanning stages. The AFM probe unit was kept stationary and the specimen was moved by the scanning stages in a raster scanning pattern.…”

mentioning

confidence: 99%

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Precision Nanometrology

Gao

2010

Springer Series in Advanced Manufacturing

100

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in writing of the publishers, or in the case of reprographic reproduction in accordance with the terms of licences issued by the Copyright Licensing Agency. Enquiries concerning reproduction outside those terms should be sent to the publishers. The use of registered names, trademarks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant laws and regulations and therefore free for general use. The publisher makes no representation, express or implied, with regard to the accuracy of the information contained in this book and cannot accept any legal responsibility or liability for any errors or omissions that may be made. Cover design: eStudioCalamar, Figueres/BerlinPrinted on acid-free paper Springer is part of Springer Science+Business Media (www.springer.com) To my family Preface "When you can measure what you are speaking about, and express it in numbers, you know something about it; but when you cannot express it in numbers, your knowledge is of a meager and unsatisfactory kind; it may be the beginning of knowledge, but you have scarcely in your thoughts advanced to the state of science." -Lord KelvinThe act of measuring, which is used for determining the size, amount or degree of a parameter by an instrument through comparison with a standard unit, or used indirectly by calculation based on theory, makes science and technology different from imagination. Measurement is also essential in industry, commerce and daily life. If we focus on the manufacturing industry, we can easily find that dimensional metrology plays an increasingly important role not only in the traditional field of manufacturing but also in the advanced field of nanomanufacturing, represented by ultra-precision machining and semiconductor fabrication.Nanomanufacturing is a process of using precision machines that can generate precision tool motions to fabricate designed surface forms/dimensions with nanometric tolerances. Dimensional measurement of the workpiece and the machine is always an essential process for the purpose of quality control in all kinds of manufacturing. Because accuracy is the most important requirement for nanomanufacturing, the dimensional measurement is a much more crucial process for nanomanufacturing than other kinds of manufacturing. Figure 0.1 shows tolerances with respect to the dimensions of the workpieces and machines in nanomanufacturing. It can be seen that most of the workpieces and machines have sizes ranging from micrometers to meters while the corresponding tolerances range from 100 nm to 0.1 nm. In addition, more and more precision workpieces are required in a shorter amount of time in order to reduce manufacturing costs. Shapes of the precision workpieces are also becoming more and more complex. These factors are bringing greater challenges to the existing measuring technologies of precision metrology and nanometrology.Precision metrology has a long history tracing back to the inventions of the micrometer (J. Watt 1772), gage b...

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“…As shown in Equation 6.56, the spindle error e spindle (z, ) at the position z can be expressed as the superposition of infinite series of periodic functions [22]:…”

Section: Error Separation Methods For Slide Straightness Measurementmentioning

confidence: 99%

mentioning

confidence: 99%

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Precision Nanometrology

Gao

2010

Springer Series in Advanced Manufacturing

100

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“…However, in most cases, the three basic error motions exist simultaneously and are often illustrated using polar graphs, where the error motion is plotted against the angular position of the rotor. 6 Sensitive direction is the direction perpendicular to the work piece surface through the instantaneous point of machining or measurement. It can be classified into fixed and rotating sensitive directions.…”

Section: Introductionmentioning

confidence: 99%

A novel measuring module for spindle rotational accuracy based on virtual instrument

Chen

Zhao

Gao

et al. 2017

Advances in Mechanical Engineering

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The spindle rotational accuracy is an important indicator to evaluate the characteristic of a machine tool. In this article, an easy-to-use measuring module is proposed based on virtual instrument platform. A new method for measuring rotational speed and angular orientation using an adaptive filtering method to processing the target installation eccentricity is proposed, instead of using the encoder. This method can reduce the measuring cost and make the measurement more convenient, without affecting the measuring accuracy. Meanwhile, the selective principle of target installation eccentricity for rotating sensitive direction is investigated by theoretical analysis and numerical simulation. Based on the proposed method, measuring module is developed. National Instruments data acquisition card and capacitive sensors are used to acquire the displacement signals of the spindle rotational error motion. Contrast experiments with the commercial measuring software are performed to validate the feasibility and repeatability of the proposed measuring module. The experimental results demonstrate that the developed measuring module can reach the same precision using less test parameters.

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“…Marsh and Grejda 5 described the master axis method for machine tool spindle measurement, which allowed the measurements to be carried out at speed and under load. Hii et al 6 investigated the radial and tilt error motions of the prototype spindle using an analytical model and experimental measurements. The analytical model was used for the prediction of the synchronous error motion by roundness profile measurements of the rotor.…”

Section: Introductionmentioning

confidence: 99%

Measurement and analysis for frequency domain error of ultra-precision spindle in a flycutting machine tool

Chen

Sun

An³

et al. 2016

Proceedings of the Institution of Mechanical Engineers, Part B:

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The ultra-precision spindle is the key component of ultra-precision machine tool, which largely influences the machining accuracy. Its frequency characteristics mainly affect the frequency domain error of the machined surface. In this article, the error measurement setup for the ultra-precision aerostatic spindle in a flycutting machine tool is established. The dynamic and multi-direction errors of the spindle are real-time measured under different rotation speeds. Then, frequency domain analysis is carried out to obtain its regularity characteristics based on the measurement result. Through the analysis, the main synchronous and asynchronous errors with relatively large amplitude of the spindle errors are found, and the amplitude change law of these main spindle errors is obtained. Besides, the cause of the main synchronous and asynchronous errors is also analyzed and indicated. This study deepens the understanding of ultra-precision spindle dynamic characteristics and plays the important role in the spindle frequency domain errors' control, machining process planning, frequency characteristics analysis and oriented control of the machined surface errors.

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Error motion of a kinematic spindle

Cited by 20 publications

References 8 publications

Precision Nanometrology

Precision Nanometrology

A novel measuring module for spindle rotational accuracy based on virtual instrument

Measurement and analysis for frequency domain error of ultra-precision spindle in a flycutting machine tool

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