Precision Nanometrology

Abstract

in writing of the publishers, or in the case of reprographic reproduction in accordance with the terms of licences issued by the Copyright Licensing Agency. Enquiries concerning reproduction outside those terms should be sent to the publishers. The use of registered names, trademarks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant laws and regulations and therefore free for general use. The publisher makes no representation, express or implied, with regard to the accuracy of the information contained in this book and cannot accept any legal responsibility or liability for any errors or omissions that may be made. Cover design: eStudioCalamar, Figueres/BerlinPrinted on acid-free paper Springer is part of Springer Science+Business Media (www.springer.com) To my family Preface "When you can measure what you are speaking about, and express it in numbers, you know something about it; but when you cannot express it in numbers, your knowledge is of a meager and unsatisfactory kind; it may be the beginning of knowledge, but you have scarcely in your thoughts advanced to the state of science." -Lord KelvinThe act of measuring, which is used for determining the size, amount or degree of a parameter by an instrument through comparison with a standard unit, or used indirectly by calculation based on theory, makes science and technology different from imagination. Measurement is also essential in industry, commerce and daily life. If we focus on the manufacturing industry, we can easily find that dimensional metrology plays an increasingly important role not only in the traditional field of manufacturing but also in the advanced field of nanomanufacturing, represented by ultra-precision machining and semiconductor fabrication.Nanomanufacturing is a process of using precision machines that can generate precision tool motions to fabricate designed surface forms/dimensions with nanometric tolerances. Dimensional measurement of the workpiece and the machine is always an essential process for the purpose of quality control in all kinds of manufacturing. Because accuracy is the most important requirement for nanomanufacturing, the dimensional measurement is a much more crucial process for nanomanufacturing than other kinds of manufacturing. Figure 0.1 shows tolerances with respect to the dimensions of the workpieces and machines in nanomanufacturing. It can be seen that most of the workpieces and machines have sizes ranging from micrometers to meters while the corresponding tolerances range from 100 nm to 0.1 nm. In addition, more and more precision workpieces are required in a shorter amount of time in order to reduce manufacturing costs. Shapes of the precision workpieces are also becoming more and more complex. These factors are bringing greater challenges to the existing measuring technologies of precision metrology and nanometrology.Precision metrology has a long history tracing back to the inventions of the micrometer (J. Watt 1772), gage b...

A Study of Mechanics in Brittle–Ductile Cutting Mode Transition

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Determination of the zero-position for an optical angle sensor

“…To solve the problems, an optical sensor head employing quadrant photodiodes or SPDs, which have also been employed in this paper, has been proposed (Gao, 2010). Figure 1(b) shows the optical setup for the angle sensor employing a SPD as the photodetector.…”

High Resolution Clinometers for Measurement of Roll Error Motion of a Precision Linear Slide

“…However, in most of the cases, mechanical structures of such precision linear slides do not meet the Abbe principle [7][8][9]; there exist a certain amount of offset between the motion axis of a slide table and the measurement axis of a position sensor, which is referred to as the Abbe offset. The Abbe error is a serious error factor for the precision linear slide because even a small yaw error of the slide stable could cause a large positioning error [10][11][12]. Figure 1 shows a schematic of a linear slide with a linear encoder.…”