Experimental and numerical investigation of laboratory crystal growth furnace for the development of model-based control of CZ process

Bergfelds, Kristaps; Pudžs, Mihails; Sabanskis, Andrejs; Virbulis, J.

doi:10.1016/j.jcrysgro.2019.06.029

Cited by 5 publications

(2 citation statements)

References 5 publications

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“…Such "model experiments" are, therefore, predestined for the validation of numerical simulation and are of growing interest, e.g. for investigation of flow phenomena [8][9][10], process control [11,12], or phase boundary stability [13]. Within the NEMOCRYS (Next Generation Multiphysical Models for Crystal Growth Processes) project, we are developing a new generation of multiphysical models [14,15] and model experiments for crystal growth processes, where multiple physical phenomena can be observed simultaneously and hence validated in a coupled manner.…”

Section: Introductionmentioning

confidence: 99%

Model experiments for Czochralski crystal growth processes using inductive and resistive heating

Enders-Seidlitz

Pal

Dadzis

2022

IOP Conf. Ser.: Mater. Sci. Eng.

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The Czochralski (CZ) growth technique is widely applied in crystal growth, using both induction and resistance heaters. In this work, a novel model experiment platform with comprehensive in-situ measurement capability is introduced. Growth experiments with the model material tin applying both heating concepts are performed and analyzed, e.g., in terms of the maximum achievable crystal diameter. Strong asymmetries in the magnetic field of the induction heater are measured and temperature distribution on the resistance heater is found to be non-uniform. Furthermore, significant losses are observed in the power supplies of the resistance heater. The heating efficiency of both concepts is compared considering different insulation geometries. The obtained results show the capability of model experiments for design optimization and will provide valuable input for further validation of numerical simulations.

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Section: Introductionmentioning

confidence: 99%

Model experiments for Czochralski crystal growth processes using inductive and resistive heating

Enders-Seidlitz

Pal

Dadzis

2022

IOP Conf. Ser.: Mater. Sci. Eng.

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“…Studies have been carried out for models of different level and purpose aimed at solving this complex problem based on the theory of similarity. Physical [9-14, 29, 36] and numerical [9,14,[20][21][22][23][24][25][26][27][29][30][31][32][33][34][35][36][37][38][39][40][41] simulation are widely used and permanently improved. Global numerical models have been developed in recent years [25][26][27][33][34][35][36][37][38][39][40][41] as an attempt to calculate complex conjugate heat and mass exchange in growth chambers.…”

Section: Introductionmentioning

confidence: 99%

Hydrodynamics and heat exchange of crystal pulling from melts. Part I: Experimental studies of free convection mode

Бердников¹

2019

MoEM

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This work is a brief overview of experimental study results for hydrodynamics and convective heat exchange in thermal gravity capillary convection modes for the classic Czochralski technique setup obtained at the Institute of Thermophysics, Siberian Branch of the Russian Academy of Sciences. The experiments have been carried out at test benches which simulated the physics of the Czochralski technique for 80 and 295 mm diameter crucibles. Melt simulating fluids with Prandtl numbers Pr = 0.05, 16, 45.6 and 2700 have been used. Experiments with transparent fluids have been used for comparing the evolution of flow structure from laminar mode to well-developed turbulent mode. Advanced visualization and measurement methods have been used. The regularities of local and integral convective heat exchange in the crucible/melt/crystal system have been studied. The experiments have shown that there are threshold Grashof and Marangoni numbers at which the structure of the thermal gravity capillary flow undergoes qualitative changes and hence the regularities of heat exchange in the melt change. The effect of melt hydrodynamics on the crystallization front shape has been studied for Pr = 45.6. Crystallization front shapes have been determined for the 1 × 105 to 1.9 × 105 range of Grashof numbers. We show that the crystallization front shape depends largely on the spatial flow pattern and the temperature distribution in the melt.

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Development and validation of a thermal simulation for the Czochralski crystal growth process using model experiments

Enders-Seidlitz

Pal

Dadzis

2022

Journal of Crystal Growth

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Experimental and numerical investigation of laboratory crystal growth furnace for the development of model-based control of CZ process

Cited by 5 publications

References 5 publications

Model experiments for Czochralski crystal growth processes using inductive and resistive heating

Model experiments for Czochralski crystal growth processes using inductive and resistive heating

Hydrodynamics and heat exchange of crystal pulling from melts. Part I: Experimental studies of free convection mode

Development and validation of a thermal simulation for the Czochralski crystal growth process using model experiments

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