2012
DOI: 10.1021/jp207114u
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Experimental and Theoretical Study of AC Electrical Conduction Mechanisms of Semicrystalline Parylene C Thin Films

Abstract: The electrical conduction mechanisms of semicrystalline thermoplastic parylene C (-H(2)C-C(6)H(3)Cl-CH(2)-)(n) thin films were studied in large temperature and frequency regions. The alternative current (AC) electrical conduction in parylene C is governed by two processes which can be ascribed to a hopping transport mechanism: correlated barrier hopping (CBH) model at low [77-155 K] and high [473-533 K] temperature and the small polaron tunneling mechanism (SPTM) from 193 to 413 K within the framework of the u… Show more

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Cited by 138 publications
(70 citation statements)
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“…We note that "U eff " decreases with the increase in the frequency, this result is in good agreement with the literature. 42 This trend is in accord with the electronic conduction by hopping for these ranges of frequency and temperature. Indeed, while considering this mode of conduction, the increase in the application frequency of the electric field will support the electronic jumps amongst the localized states, which will be translated into energy U eff by a lowering of the value.…”
Section: The Cbh Model (Phases I Ii and Iii)supporting
confidence: 78%
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“…We note that "U eff " decreases with the increase in the frequency, this result is in good agreement with the literature. 42 This trend is in accord with the electronic conduction by hopping for these ranges of frequency and temperature. Indeed, while considering this mode of conduction, the increase in the application frequency of the electric field will support the electronic jumps amongst the localized states, which will be translated into energy U eff by a lowering of the value.…”
Section: The Cbh Model (Phases I Ii and Iii)supporting
confidence: 78%
“…We observe the augmentation of both parameters a and N (E F ) with frequency, which is in accord with the literature. 42,44 The reasonably high values of N (E F ) ($10 27 eV À1 cm À3 ) suggest that the hopping between the pairs of sites dominates the mechanism of charge transport in the [N(CH 3 ) 3 H] 2 CuCl 4 hybrid compound. 44 The values of the tuning distance (R x ) determined from Eq.…”
Section: The Small Polaron Tunneling (Nspt) Model (Phase Iv)mentioning
confidence: 99%
“…In this situation, the curve cannot be extended to high temperature range because there will be a dielectric loss peak at the frequency x m . [18,30]. The value of x m is given by the following relation:…”
Section: Resultsmentioning
confidence: 99%
“…[24][25][26] One of the most important applications of parylene thin films is used as the inter-level dielectric insulators within largescale integration (LSI). In this case, the parylene thin films must have low dielectric constant and high electric resistance, so the measurement of the electrical properties for parylene thin films is a necessary technology.…”
mentioning
confidence: 99%