The subthreshold slope of a conventional FET is over 60 mV/dec at room temperature. One of the proposed devices capable of overcoming this limitation is a superlattice FET (SLFET). In this study, we determined the feasibility of an SLFET experimentally. To overcome the limitations of conventional FETs, we proposed a “leaned” superlattice structure for an FET. With the help of calculations, we fabricated InGaAs/AlAs triple-barrier p–i–n diodes instead of FETs. By using measurements recorded at room and low temperatures, we confirmed the change in slope at the expected bias through calculations.