The thermal gradient along indium-arsenide nanowires was engineered by a combination of fabricated micro-trenches in the supporting substrate and focused laser irradiation. This allowed local control of thermally activated oxidation reactions of the nanowire on the scale of the diffraction limit. The locality of the oxidation was detected by microRaman mapping, and the results were found consistent with numerical simulations of the temperature profile. Applying the technique to nanowires in electrical devices the locally oxidized nanowires remained conducting with a lower conductance as expected for an effectively thinner conducting core.Semiconductor nanowires (NWs) offer a range of properties which makes them attractive to diverse areas of research and technology. The reduced size and high surfaceto-volume ratio make them promising candidates for advanced electronics . Also, the confinement offered by the NW geometry may allow devices providing greatly enhanced thermoelectric properties 7,8 . In order to exploit the potential of semiconductor NWs for devices with improved or new functionalities, methods of locally controlling the properties along the NWs are often required. Such control has been demonstrated either by advanced device architectures incorporating local electrostatic gates 9,10 or by modifying the crystal properties along the wire by changing material composition during or after growth [11][12][13] . An alternative approach which has recently emerged is the possibility of using a high intensity focused laser beam to locally induce chemical changes in the NW 14 . By combination of Raman spectroscopy 15 and transmission electron microscopy 16 it has been established that for the case of InAs the high intensity laser, in the presence of ambient air conditions, promotes the oxidation process As 2 O 3 +2InAs→In 2 O 3 +4As which converts the irradiated parts of the NW surface to crystalline arsenic and polycrystalline indium oxide
16. However, so far, only little is known about the properties of the resulting structures and the spatial resolution that can be achieved has not been analyzed. A similar process occurs for GaAs, and Yazji, S. et al 17 showed that the thermal conductivity of the NW is dramatically decreased upon irradiation, suggesting this method as a way of designing structures with enhanced thermoelectric properties.Here we show that by suspending NWs over microtrenches etched into a SiO 2 substrate the temperature profile of the NW can be locally engineered. By tuning the laser intensity, only the suspended parts of the wires will reach a temperature sufficient to activate the oxidation process.Using Raman spectroscopy we demonstrate the viability of this approach, achieving a spatial resolution of at least 250 nm; the size of the detection area of our Raman setup. Finally, we study the electrical properties of the oxidized NWs and show that they maintain their ability to carry electrical current and also preserve the key semiconductor property of electrostatic tunability using a nearby ...