“…The analytical method is mainly nodal aberration theory (NAT) [ 18 , 19 , 20 , 21 , 22 , 23 ]. Importantly, NAT provides an aberration model that yields to obtain insight into the aberration response to misalignments [ 24 , 25 , 26 , 27 ] and guide optical alignment [ 28 , 29 , 30 , 31 , 32 , 33 , 34 , 35 , 36 , 37 ].…”