2014
DOI: 10.1109/tmech.2014.2300481
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Experimental Investigation of Robust Motion Tracking Control for a 2-DOF Flexure-Based Mechanism

Abstract: The design, parameter identification and robust motion tracking control of a two degree of freedom (2-DOF) flexurebased micro/nanomechanism are presented in this paper. In the presented compliant mechanism, the cross-axis coupling ratio is below 1% indicating excellent decoupling performance. Despite this, during motion tracking the cross coupling effect cannot be ignored. To enhance the accuracy of micro/nanomanipulation, a laser interferometry-based sensing and measurement system is established. Nonlineariti… Show more

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Cited by 69 publications
(7 citation statements)
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“…This stage is composed of a positioning compliant mechanism (PCM) and the piezoelectric transducer (PZT). For this microelectromechnical system, the PCM can be looked as a mass-spring-damper mechanical system and the PZT can be regarded as a force generator that generates force due to the applied voltage [32], [33]. The dynamical equation of this system can be formulated as follows:…”
Section: System Descriptionmentioning
confidence: 99%
“…This stage is composed of a positioning compliant mechanism (PCM) and the piezoelectric transducer (PZT). For this microelectromechnical system, the PCM can be looked as a mass-spring-damper mechanical system and the PZT can be regarded as a force generator that generates force due to the applied voltage [32], [33]. The dynamical equation of this system can be formulated as follows:…”
Section: System Descriptionmentioning
confidence: 99%
“…In the process of indenting large spherical cells, the interaction force can be detected by piezoelectric force sensors, enabling force-feedback control to be performed [2,3]. Recent investigations into the micropositioning of samples has demonstrated accurate and efficient placement on micrometre and nanometre scales [4][5][6][7]. Image processing algorithms have also been adopted to trace the deformation of the indented cells in order to improve the automated microinjection of single cells [8][9][10].…”
Section: Introductionmentioning
confidence: 99%
“…Micro/nano manipulation mechanisms have become an important field of study, with application areas in different industries such as nano-imprint, cell manipulation, scanning probe microscopes, high-density data recording, optical instruments, measurement systems, and micro/nano manipulations [1][2][3][4][5][6][7][8][9]. A micro/nano manipulation mechanism has several advantages over the conventional manipulators.…”
Section: Introductionmentioning
confidence: 99%