2020
DOI: 10.1016/j.precisioneng.2020.02.004
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Experimental investigation on CO2 laser-assisted micro-slot milling characteristics of borosilicate glass

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Cited by 26 publications
(6 citation statements)
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“…Furthermore, the wettability of the micro-machined surfaces can be more advantageous, if the cutting tool or the workpiece is vibrated in an optimised ultrasonic frequency. The tool life and the process efficiency can be increased by the application of laser supported micromachining technologies [195,196,289,290]. Their application also helps to improve the surface quality.…”
Section: Future Trends and Outlookmentioning
confidence: 99%
“…Furthermore, the wettability of the micro-machined surfaces can be more advantageous, if the cutting tool or the workpiece is vibrated in an optimised ultrasonic frequency. The tool life and the process efficiency can be increased by the application of laser supported micromachining technologies [195,196,289,290]. Their application also helps to improve the surface quality.…”
Section: Future Trends and Outlookmentioning
confidence: 99%
“…The proposed technology using laser preheating is to reduce the surface mechanical properties of the machined material, and reducing the wear of the tools. Taekyum Kim, et al [24] conducted the experimental study on CO 2 laser-assisted micro-slot milling C/Cs of borosilicate glass, micro-channels without cracks were made using the CO 2 laser irradiation as an assisting heat source and micro-end mill. The kerf quality C/Cs containing the top kerf width, bottom kerf width, and kerf taper have been conducted as the process responses and have been detected using microscope has been demonstrated in detail [25].…”
Section: Introductionmentioning
confidence: 99%
“…Now it is widely used in various industrial fields, such as aerospace, measuring equipment, MEMS, laser systems, etc. However, due to these excellent properties of optical glass materials, there are often some problems in machining, such as pits and cracks on the processing surface, destruction and chipping on the inport and export surfaces, tool wear, which ultimately lead to poor processing surface quality and precision, it is difficult to meet the application requirements of high-precision parts, limiting the expansion of optical glass in various fields [1][2][3][4]. Therefore, it is challenging to achieve high precision, high efficiency and low cost processing of optical glass.…”
Section: Introductionmentioning
confidence: 99%