Experimental investigation on laser micromilling of SiC microchannels

Deng, Daxiang; Xie, Yanlin; Chen, Liang; Chen, Xiaolong

doi:10.1007/s00170-018-2800-5

Cited by 26 publications

(7 citation statements)

References 39 publications

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“…That is, the surface roughness increased with the increasing channel depth for the nanocomposites with 0.5 wt.%, 1 wt.%, 1.5 wt.%, and 2.5 wt.% GNPs. This is because the increase in the surface roughness with the increase in the depth occurred partly due to more molten materials, and evaporation caused the redeposited material, which affected the generated finished surface [ 44 ]. Perrie et al [ 50 ] found that the surface roughness of the ablated microchannel increases with the machined depth due to the material redeposition.…”

Section: Resultsmentioning

confidence: 99%

“…This is because the laser energy per unit area decreased due to the reduced interaction time between the laser beam and material with an increase in the scanning speed. This resulted in fewer molten materials being deposited on the bottom surface [ 44 ].…”

Section: Resultsmentioning

confidence: 99%

“…The output responses, including the microchannels’ geometries (depth and top width), material removal rate, surface roughness, and surface morphology, were used to appraise the influence of the graphene contents on the micromachining behavior of the GNP/Al 2 O 3 nanocomposites. After machining, all machined specimens were first cleaned using ethanol to remove any loose debris or contaminants on the fabricated microchannels [ 44 ]. Then, the dimensional accuracy and surface roughness were measured by a 3D optical profilometer (DektakXT Stylus Profiler) from Bruker (Billerica, MA, USA).…”

Section: Methodsmentioning

confidence: 99%

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Sustainable Microfabrication Enhancement of Graphene Nanoplatelet-Reinforced Biomedical Alumina Ceramic Matrix Nanocomposites

et al. 2023

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Studies about adding graphene reinforcement to improve the microfabrication performance of alumina (Al2O3) ceramic materials are still too rare and incomplete to satisfy sustainable manufacturing requirements. Therefore, this study aims to develop a detailed understanding of the effect of graphene reinforcement to enhance the laser micromachining performance of Al2O3-based nanocomposites. To achieve this, high-density Al2O3 nanocomposite specimens were fabricated with 0 wt.%, 0.5 wt.%, 1 wt.%, 1.5 wt.%, and 2.5 wt.% graphene nanoplatelets (GNPs) using a high-frequency induction heating process. The specimens were subjected to laser micromachining. Afterward, the effects of the GNP contents on the ablation depth/width, surface morphology, surface roughness, and material removal rate were studied. The results indicate that the micro-fabrication performance of the nanocomposites was significantly affected by the GNP content. All nanocomposites exhibited improvement in the ablation depth and material removal rate compared to the base Al2O3 (0 wt.% GNP). For instance, at a higher scanning speed, the ablation depth was increased by a factor of 10 times for the GNP-reinforced specimens compared to the base Al2O3 nanocomposites. In addition, the MRRs were increased by 2134%, 2391%, 2915%, and 2427% for the 0.5 wt.%, 1 wt.%, 1.5 wt.%, and 2.5 wt.% GNP/Al2O3 nanocomposites, respectively, compared to the base Al2O3 specimens. Likewise, the surface roughness and surface morphology were considerably improved for all GNP/Al2O3 nanocomposite specimens compared to the base Al2O3. This is because the GNP reinforcement reduced the ablation threshold and increased the material removal efficiency by increasing the optical absorbance and thermal conductivity and reducing the grain size of the Al2O3 nanocomposites. Among the GNP/Al2O3 nanocomposites, the 0.5 wt.% and 1 wt.% GNP specimens showed superior performance with minimum defects in most laser micromachining conditions. Overall, the results show that the GNP-reinforced Al2O3 nanocomposites can be machined with high quality and a high production rate using a basic fiber laser system (20 Watts) with very low power consumption. This study shows huge potential for adding graphene to alumina ceramic-based materials to improve their machinability.

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Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

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Sustainable Microfabrication Enhancement of Graphene Nanoplatelet-Reinforced Biomedical Alumina Ceramic Matrix Nanocomposites

et al. 2023

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“…Zhang et al [ 13 ] studied the multiscale evolution of V-grooves under femtosecond laser irradiation, analyzed the evolution mechanism, and established a self-organization model. The report by Deng et al [ 14 ] analyzed the formation of microchannels and evaluated the effect of the laser processing parameters on the surface morphology and geometry systematically. The above studies investigated the ablation mechanism, profile, and morphology of single-crystal SiC.…”

Section: Introductionmentioning

confidence: 99%

Effect of Femtosecond Laser Processing Parameters on the Ablation Microgrooves of RB-SiC Composites

Yang

Kang

et al. 2023

Materials

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Because of the high hardness, brittleness, and anisotropy of reaction-bonded silicon carbide composites (RB-SiC), it is challenging to process high-quality textures on their surfaces. With the advantages of high processing accuracy and low processing damage, femtosecond laser processing is the preferred technology for the precision processing of difficult-to-process materials. The present work used a femtosecond laser with a linear scanning path and a spot diameter of 18 µm to process microgrooves on RB-SiC. The influence of different processing parameters on the microgroove profile, dimensions, and ablation rate (AR) was investigated. The ablation width Wa and average ablation depth Da of microgrooves were evaluated, and the various patterns of varying processing parameters were obtained. A model for Wa prediction was developed based on the laser fluence within the finite length (FL). As a result, the experimental values were distributed near the prediction curve with a maximum error of 20.4%, showing an upward trend of gradually decreasing increments. For a single pass, the AR value was mainly determined by the laser energy, which could reach the scale of 106 μm3/s when the laser energy was greater than 50 μJ. For multiple passes, the AR value decreased as the number of passes increased and it finally stabilized. The above research will provide theoretical and experimental support for the high-quality and efficient processing of RB-SiC surface textures.

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“…However, the shortcomings of the EDM, such as relatively rough surface, low precision, high tool wear rate, and low productivity, are unfavorable for the fabrication of SiC microchannels. In addition, the laser cutting method has been used to process SiC microchannels by Deng et al [21]. However, the geometries of microchannels can be hardly monitored by laser cutting process, and the expensive equipment and low productivity of laser cutting are also problems for the fabrication of SiC microchannels.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of silicon carbide microchannels by thin diamond wheel grinding

Xie

Deng

et al. 2020

Int J Adv Manuf Technol

Self Cite

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Silicon carbide (SiC) microchannels are attractive for their wide applications in microsensors, MOS devices, UV photodiodes, microcatalytic reactors, and microchannel heat exchangers in harsh environments. However, the machining of SiC microchannels poses many challenges because of the difficulty and cost involved in the material removal process due to the high hardness and brittleness of SiC ceramic. In the present study, we developed a thin diamond wheel grinding process to fabricate SiC microchannels in a conventional vertical milling machine. Microchannels with trapezoidal shapes were successfully processed in SiC substrates by thin diamond wheels. The formation, geometric dimensions, and surface quality of SiC microchannels were studied together with the analysis of material removal mechanism. The effects of grinding processing parameters, i.e., wheel speed, feed speed, grinding depth, and grinding tool parameters including grit size and thickness of diamond grinding wheel, on the geometric dimension and surface morphology were comprehensively explored. The top width of microchannels first increased and then decreased with the increase in wheel speed, whereas a reverse tendency was observed with increasing grinding depth, feed speed, and grit size. The surface roughness decreased continuously with increasing wheel speed, but it tended to increase with the increase in feed speed generally. The variations in geometric dimensions and surface roughness of SiC microchannels can be related to the crack or fracture propagations and material removal mechanism during the thin diamond wheel grinding process. Besides, the influential significance of the above processing and grinding tool parameters were also evaluated by analysis of variance (ANOVA).

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Experimental investigation on laser micromilling of SiC microchannels

Cited by 26 publications

References 39 publications

Sustainable Microfabrication Enhancement of Graphene Nanoplatelet-Reinforced Biomedical Alumina Ceramic Matrix Nanocomposites

Sustainable Microfabrication Enhancement of Graphene Nanoplatelet-Reinforced Biomedical Alumina Ceramic Matrix Nanocomposites

Effect of Femtosecond Laser Processing Parameters on the Ablation Microgrooves of RB-SiC Composites

Fabrication of silicon carbide microchannels by thin diamond wheel grinding

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