Experimental research on buckling of thin films in nano-scale under mechanical and thermal loading

Wang, S. B.; Jia, Hanxiang; Ren, Xiang‐Kui; Li, L. A.

doi:10.1117/12.839250

Cited by 2 publications

(1 citation statement)

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“…Straight side buckling of titanium films with 150 nm thickness deposited on an organic glass substrate has been studied by applying a system which also offers compression on film/substrate under mechanical and thermal loads. It is studied that the size and the number of thin film bucklings are influenced by the pre-fixed mechanical loading [11,12]. The buckling of stiff thin film/compliant substrate system then has been studied for its many important applications, such as stretchable electronics, micro-and nano-electromechanical systems (MEMS and NEMS), force spectroscopy in cells, biocompatible topographic matrices for cell alignment, high precision micro and nano-metrology methods, as well as pattern formation for micro/nano-fabrication [13].…”

Section: Introductionmentioning

confidence: 99%

Experimental investigation on cumulative propagation of thin film buckling under cyclic load

Wang

Jia

et al. 2011

Sci. China Technol. Sci.

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As instrument technology is needed for rapid determination of the smaller, thinner and lighter specimens, more stringent demands are related to thin films such as micro-electro-mechanical systems (MEMS), dielectric coatings and electronic packaging. Therefore, the requirement for testing platforms for rapidly determine the mechanical properties of thin films is increasing. Buckling of a film/substrate system could offer a variety of applications, ranging from stretchable electronics to micro-nanoscale metrology. In this paper, a fatigue-loading device has been designed to make the cyclic loading available for investigating the cumulative propagation of thin film buckling. The straight side buckling of thin compressed titanium film with the thickness of 50 nm deposited on organic glass substrates is investigated by using an optical microscope. The cumulative buckling propagation under the cyclic loading of a sequence of peak compression with the frequency 1 Hz is recorded by CCD camera. The buckling extension lengths are calculated by digital image measurement technology. thin film, cyclic load, buckling propagation, digital image processing Citation: Wang S B, Jia H K, Li L A, et al. Experimental investigation on cumulative propagation of thin film buckling under cyclic load.

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Section: Introductionmentioning

confidence: 99%