Experimental results using a “low-voltage booster” in a conventional SEM

Plies, Erich; Degel, B; Hayn, A.; Knell, G.; Neumann, Jennifer; Schiebel, B.

doi:10.1016/s0168-9002(98)01560-5

Cited by 4 publications

(2 citation statements)

References 4 publications

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“…In the former system, a retarding electric field applied on the specimen decelerates the primary electron beam to the final landing energy. The latter possesses an electron beam booster [13,14] inside the electron column to accelerate the primary electron to several kiloVolts. These boosted electrons are decelerated to the landing energy at the pole-piece of objective lens at the end of the electron column.…”

Section: Introductionmentioning

confidence: 99%

Sharing of secondary electrons by in-lens and out-lens detector in low-voltage scanning electron microscope equipped with immersion lens

Kumagai

Sekiguchi

2009

Ultramicroscopy

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Section: Introductionmentioning

confidence: 99%

Sharing of secondary electrons by in-lens and out-lens detector in low-voltage scanning electron microscope equipped with immersion lens

Kumagai

Sekiguchi

2009

Ultramicroscopy

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“…To improve image resolution, several modifications of components of SEM systems have been adopted, such as the use of the immersion objective lens, the compound object lens superimposed with electrostatic and magnetic field objective lens, and the retarding field objective lens. [1][2][3][4][5][6][7][8] These lenses reduce spherical and chromatic aberrations drastically, especially at lower accelerating voltages of less than 2 keV. However, systems for detecting secondary electrons (SEs) are more complex because the magnetic and electrostatic fields change energies and angles of emitted SEs depending on electron optics conditions such as accelerating voltage and working distance.…”

Section: Introductionmentioning

confidence: 99%

Development of a fountain detector for spectroscopy of secondary electrons in scanning electron microscopy

Agemura¹,

Kimura²,

Sekiguchi³

2018

Jpn. J. Appl. Phys.

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The low-pass secondary electron (SE) detector, the so-called “fountain detector (FD)”, for scanning electron microscopy has high potential for application to the imaging of low-energy SEs. Low-energy SE imaging may be used for detecting the surface potential variations of a specimen. However, the detected SEs include a certain fraction of tertiary electrons (SE3s) because some of the high-energy backscattered electrons hit the grid to yield SE3s. We have overcome this difficulty by increasing the aperture ratio of the bias and ground grids and using the lock-in technique, in which the AC field with the DC offset was applied on the bias grid. The energy-filtered SE images of a 4H-SiC p–n junction show complex behavior according to the grid bias. These observations are clearly explained by the variations of Auger spectra across the p–n junction. The filtered SE images taken with the FD can be applied to observing the surface potential variation of specimens.

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Corrections of magnification and focusing in a cathode lens-equipped scanning electron microscope

Zobačová¹,

Zobač²,

Oral³

et al. 2006

Scanning

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One of the well-proven and efficient methods of obtaining a very low-energy impact of primary electrons in the scanning electron microscope is to introduce a retarding field element below the pole piece of the objective lens (OL). It is advantageous to use the specimen alone as the negatively biased electrode (i.e., cathode of the cathode lens). The optical power of the cathode lens modifies some of the standard parameters of the image formation such as relation of working distance to OL excitation or magnification to the scanning coils current, the impact angle of primary electrons, and so forth. In computer-controlled electron microscopes these parameters, particularly with regard to focusing and magnification, can be corrected automatically. Derivation of algorithms for such corrections and their experimental verifications are presented in this paper. Furthermore, a more accurate analytical expression for the focal length of an aperture lens is derived.

show abstract

Experimental results using a “low-voltage booster” in a conventional SEM

Cited by 4 publications

References 4 publications

Sharing of secondary electrons by in-lens and out-lens detector in low-voltage scanning electron microscope equipped with immersion lens

Sharing of secondary electrons by in-lens and out-lens detector in low-voltage scanning electron microscope equipped with immersion lens

Development of a fountain detector for spectroscopy of secondary electrons in scanning electron microscopy

Corrections of magnification and focusing in a cathode lens-equipped scanning electron microscope

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