Sharing of secondary electrons by in-lens and out-lens detector in low-voltage scanning electron microscope equipped with immersion lens

Kumagai, Kazuhiro; Sekiguchi, Takashi

doi:10.1016/j.ultramic.2009.01.005

Cited by 50 publications

(32 citation statements)

References 15 publications

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“…− 131 − lower kinetic energy are sucked in the column by the field [14]. As a result, the IL detector mainly detects electrons emitted with low kinetic energy and the ET detector detects remaining electrons with higher kinetic energy.…”

Section: Methodsmentioning

confidence: 99%

Low-Voltage Scanning Electron Microscopy as a Tool for Surface Imaging and Analysis of Practical Materials

Nagoshi¹,

Sato²,

Aoyama³

2017

JSA

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Low-voltage scanning electron microscopy (LV-SEM), imaging and energy dispersive x-ray spectroscopy (EDX) analysis, have been applied to steel surfaces in order to clarify the performance of these techniques as a surface analysis. The information depth of LV-SEM imaging is limited by the penetration range of primary electrons. The range also limits the information depth of LV-SEM-EDX analysis. These situations are quite different from those of surface analysis techniques such as Auger electron microscopy in which the escape depth of signal electrons determines the information depth. The information depths of both LV-SEM imaging and LV-SEM-EDX analysis are an order of 10 nm for the primary electron energy of around 1 keV. We can obtain topographic, material, and elemental information from such shallow region of material surfaces with high spatial resolution. This shows that the techniques are applicable to surface analysis of practical materials although the information depth is still deeper by one order than those of the conventional surface analysis techniques.

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Section: Methodsmentioning

confidence: 99%

Low-Voltage Scanning Electron Microscopy as a Tool for Surface Imaging and Analysis of Practical Materials

Nagoshi¹,

Sato²,

Aoyama³

2017

JSA

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“…SEM observation was performed by using Multiscan Lab SEM system with a UHV Gemini column equipped with a field-emission electron gun (Omicron Nanotechnology, Germany) [7]. For SE image observation, a primary electron beam of 10 kV and 100 pA was used for excitation.…”

Section: Methodsmentioning

confidence: 99%

Image instability during the electrical measurement in scanning electron microscope

Kumagai

Chen

et al. 2011

Phys. Status Solidi (c)

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During electrical measurements in a scanning electron microscope (SEM), secondary electron (SE) images often become dark or the image contrast becomes weaker. We have revealed that this phenomenon originates in the negative charging of the insulating part in an electric circuit. This charging can be caused by stray electrons, even if the insulator is not directly irradiated. The electrostatic field owing to this charge deflects SEs and reduces the intensity of detected electrons. We have demonstrated this effect by observing systematic shifts of the field of view of SE detector, which appears in SE images. This explanation is supported by a calculation of electron trajectories in the electrostatic field in the SEM chamber. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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“…In this system, two SE detectors were employed for electron detection: an annular inlens detector [9] located in the electron column, and a conventional Everhart-Thornley (E-T) detector [10] installed on the wall of specimen chamber. The former effectively collects lower-energy SEs [11]. On the other hand, the latter efficiently detects higher-energy SEs [11].…”

Section: Methodsmentioning

confidence: 99%

“…The former effectively collects lower-energy SEs [11]. On the other hand, the latter efficiently detects higher-energy SEs [11]. The pressure of the specimen chamber is kept in ultra high vacuum (< 10 -8 Pa) to save specimen from contamination and to obtain reproducible SE images.…”

Section: Methodsmentioning

confidence: 99%

Secondary electron imaging of titania thin film for surface potential analysis

Kumagai¹,

Sekiguchi²

2011

Phys. Status Solidi (c)

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We demonstrate the surface potential sensitivity of secondary electron (SE) imaging of titania thin film by scanning electron microscopy (SEM), and discuss the image formation mechanism. The 1‐nm titania film on Si substrate was imaged as bright region against the substrate. The SE image of the film varied with SE detector, but did not with primary electron energy. The contrast of the film was reversed by only 1‐nm carbon deposition. This result suggests that a slight change of surface potential altered the efficiency of secondary electron emission. This high sensitivity of secondary electrons to the surface potential is promising for improvement of thin‐film observation by SEM. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

show abstract

Sharing of secondary electrons by in-lens and out-lens detector in low-voltage scanning electron microscope equipped with immersion lens

Cited by 50 publications

References 15 publications

Low-Voltage Scanning Electron Microscopy as a Tool for Surface Imaging and Analysis of Practical Materials

Low-Voltage Scanning Electron Microscopy as a Tool for Surface Imaging and Analysis of Practical Materials

Image instability during the electrical measurement in scanning electron microscope

Secondary electron imaging of titania thin film for surface potential analysis

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