2008
DOI: 10.1002/pssc.200777750
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Experimental study of the systematic errors for a Mueller matrix double rotating compensator ellipsometer

Abstract: The Mueller Matrix Ellipsometer based on the optical PC1SC2A arrangement has been developped by Collins a few years ago. We present systematic errors due to a shift of the azimuth of the optical elements (i.e. polarizer, analyzer, the two compensators). This ellipsometer is more sensible to an error due to a compensator than an error due to the analyzer or the polarizer. The errors on some coefficients mij cannot be cancelled but for the other, a four‐zone measurement method is proposed. A two zone method with… Show more

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Cited by 10 publications
(1 citation statement)
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“…The propagation of errors has been studied and can be found in Refs. [24,27,28]. With a first order approximation, we estimate that the systematic errors of our setup introduces an uncertainty for the Mueller matrix coefficients to be generally below ±0.02 except for the elements M 23 and M 32 (±0.05) which are more sensitive to errors [24].…”
Section: Characteristics Of the Setupmentioning
confidence: 85%
“…The propagation of errors has been studied and can be found in Refs. [24,27,28]. With a first order approximation, we estimate that the systematic errors of our setup introduces an uncertainty for the Mueller matrix coefficients to be generally below ±0.02 except for the elements M 23 and M 32 (±0.05) which are more sensitive to errors [24].…”
Section: Characteristics Of the Setupmentioning
confidence: 85%