Exploiting nonlinearities of micro-machined resonators for filtering applications

Ilyas, Saad; Chappanda, Karumbaiah N.; Younis, Mohammad I.

doi:10.1063/1.4986921

Cited by 34 publications

(17 citation statements)

References 31 publications

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“…Nano-and micro-electromechanical systems (NEMS and MEMS) both represent promising platforms for high sensitivity sensing applications [1]- [7]. Resonant mode vibrations are known to enhance the sensitivity of NEMS/MEMS, and the associated nonlinear behavior can allow signal processing devices to be miniaturized [8]- [14]. However, nanoscale devices are difficult to fabricate exactly as designed, and unavoidable manufacturing variations can cause changes in the various characteristics of NEMS/MEMS, with potentially significant effects on response [15]- [17].…”

Section: Introductionmentioning

confidence: 99%

Stochastic Optimal Control to Minimize the Impact of Manufacturing Variations on Nanomechanical Systems

et al. 2019

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This paper presents a control method intended to suppress the effects of manufacturing variations on nanomechanical systems. Often, the resonance characteristics of nanoscale devices are inconsistent, due to unavoidable variations in the fabrication process. This is important because resonant vibrations enhance the sensitivities of the devices. As such, the sensitivities of these systems can be degraded if the device characteristics are not identified. To address this fundamental problem, this paper presents a multidisciplinary method based on control theory, nanotechnology, and communication technology. A stochastic optimal feedback controller is employed to enhance an average sensitivity by regarding the variations as stochastic parameters. This method is applied to nanoscale receivers that detect transmitted binary data based on binary phase-shift keying in communication systems. The proposed method controls the vibrations of carbon nanotubes (CNTs) that serve as the antennas of the receiver. The proposed method is demonstrated via a numerical simulation using nanoscale receivers with the manufacturing variation. The simulation based on experimental data obtained from CNTs shows that the average performance of the devices is enhanced. INDEX TERMS Nanoelectromechanical systems, optimal control, stochastic systems.

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Section: Introductionmentioning

confidence: 99%

Stochastic Optimal Control to Minimize the Impact of Manufacturing Variations on Nanomechanical Systems

et al. 2019

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“…They are easily fabricated using conventional micro fabrication techniques. Thus, microbeam resonators have been implemented in several applications including mass sensing [1,2], mechanical computing [3][4][5][6][7], and RF communication [8,9].…”

Section: Introductionmentioning

confidence: 99%

On the response of MEMS resonators under generic electrostatic loadings: theoretical analysis

2019

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We present an investigation of the dynamic behavior of an electrostatically actuated resonant structure, resonator, under the simultaneous excitation of primary and subharmonic resonances. A comprehensive analytical solution is obtained via the method of Multiple Time Scales (MTS), which is applicable for generic electrostatic loading cases. Results using different MTS scaling methods in the equations of motion and loading conditions are compared. These results are further verified against results obtained using direct time integration of the equation of motion. It is observed that for a generic parallel plate electrostatic loading case, the direct forcing component at the excitation frequency, and the direct and parametric excitation components at double the excitation frequency must be considered for accurate prediction of the structure's response. Further, the case of simultaneous excitations of primary and subharmonic resonance, where both excitations are of comparable strength, is examined under various electrostatic loading conditions. We show mixed behaviours of the resonator transiting from a subharmonic dominated response, characterized by the sudden jumps in amplitude and smaller monostable regime, to primary dominated response 2 exhibiting gradual amplitude increase and larger monostable regimes. This transition behaviour can be potentially used for applications, such as electrometers.

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“…Theoretical and experimental investigations of the nonlinear dynamics of electrostatically actuated micro/nano electromechanical (MEMS/NEMS) beam resonators have been an active area of research since the start of these technologies [1]. MEMS resonators have been used in various applications including sensors [2], mechanical computing [3,4], and radio frequency (RF) communication [5][6][7]. Recently, significant effort has been dedicated to scale down MEMS resonators into the nano regimes [8][9][10]; and investigate and utilize their nonlinear dynamics in applications, for example, mass sensing [8], mechanical computing [9], and NEMS electrometers [10].…”

Section: Introductionmentioning

confidence: 99%

On the Application of the Multiple Scales Method on Electrostatically Actuated Resonators

Ilyas

Alfosail

Younis

2019

Journal of Computational and Nonlinear Dynamics

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We investigate modeling the dynamics of an electrostatically actuated resonator using the perturbation method of multiple time scales (MTS). First, we discuss two approaches to treat the nonlinear parallel-plate electrostatic force in the equation of motion and their impact on the application of MTS: expanding the force in Taylor series and multiplying both sides of the equation with the denominator of the forcing term. Considering a spring–mass–damper system excited electrostatically near primary resonance, it is concluded that, with consistent truncation of higher-order terms, both techniques yield same modulation equations. Then, we consider the problem of an electrostatically actuated resonator under simultaneous superharmonic and primary resonance excitation and derive a comprehensive analytical solution using MTS. The results of the analytical solution are compared against the numerical results obtained by long-time integration of the equation of motion. It is demonstrated that along with the direct excitation components at the excitation frequency and twice of that, higher-order parametric terms should also be included. Finally, the contributions of primary and superharmonic resonance toward the overall response of the resonator are examined.

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Exploiting nonlinearities of micro-machined resonators for filtering applications

Cited by 34 publications

References 31 publications

Stochastic Optimal Control to Minimize the Impact of Manufacturing Variations on Nanomechanical Systems

Stochastic Optimal Control to Minimize the Impact of Manufacturing Variations on Nanomechanical Systems

On the response of MEMS resonators under generic electrostatic loadings: theoretical analysis

On the Application of the Multiple Scales Method on Electrostatically Actuated Resonators

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