2023
DOI: 10.1002/pssa.202200793
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External Gettering of Metallic Impurities by Black Silicon Layer

Abstract: Black silicon (b‐Si) has many attractive properties and is currently being adopted in various fields of semiconductor technology. It is shown here that b‐Si during thermal activation may serve as an external gettering layer to remove metallic impurities and associated defects from bulk Si. The gettering efficiency by b‐Si is estimated according to the results of studying the resistivity, defect density, interstitial iron concentration, and effective minority carrier lifetime on gettered test and ungettered ref… Show more

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Cited by 21 publications
(13 citation statements)
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“…It should be noted that during the vacuum evaporation of perovskite layers and postannealing, the structural properties of BS do not change due to the relatively low temperatures of these treatments. [ 43,44 ]…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…It should be noted that during the vacuum evaporation of perovskite layers and postannealing, the structural properties of BS do not change due to the relatively low temperatures of these treatments. [ 43,44 ]…”
Section: Resultsmentioning
confidence: 99%
“…It should be noted that during the vacuum evaporation of perovskite layers and postannealing, the structural properties of BS do not change due to the relatively low temperatures of these treatments. [43,44] Figure 4 shows optical images of perovskite layers on planar and nanotextured substrates observed with the naked eye at normal viewing angles. Layers on the planar substrate appear dark yellow.…”
Section: Structural Propertiesmentioning
confidence: 99%
“…nanostructured forms of crystalline Si are used in the production of semiconductor devices and integrated circuits for external gettering of structural defects, enhanced doping of impurities, as well as for the formation of layers sensitive to mechanical, light, and chemical influences. [27][28][29][30][31][32][33] PSi and BSi are especially intensively studied for use as antireflective frontal surfaces for single junction [34][35][36][37] and tandem [38][39][40] solar cells.…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3] This material has high potential to be commercialized for various applications, including microelectronics, photovoltaics, and biochemical sensing. [4][5][6][7] Currently, BS layers are especially intensively studied for use as antireflective frontal surfaces for single junction solar cells [8][9][10][11] and antireflective interlayers for tandem solar cells. [12][13][14] However, the large area of BS contributes to an undesirable increase in the carrier recombination rate, which results in poor spectral characteristics, especially at short wavelengths.…”
Section: Introductionmentioning
confidence: 99%