Extinction-theorem analysis of diffraction anomalies in overcoated gratings

DeSandre, Lewis F.; Elson, J. M.

doi:10.1364/josaa.8.000763

Cited by 41 publications

(11 citation statements)

References 38 publications

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“…4 -15 First, Pai and Awada 5 presented a Bremmer series method, based on the modal analysis with Fourier expansions, for dielectric gratings of arbitrary profile and groove depth in TE polarization. At the same time, DeSandre and Elson 6 presented an extinction-theorem analysis of diffraction anomalies in multilayer-coated shallow gratings by using the R-matrix propagation algorithm. Later, Li 7 applied the R-matrix algorithm to the classical modal method and enabled the latter to treat gratings of arbitrary profile, depth, and permittivity.…”

Section: Introductionmentioning

confidence: 99%

Formulation and comparison of two recursive matrix algorithms for modeling layered diffraction gratings

1996

J. Opt. Soc. Am. A

864

555

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Two recursive and numerically stable matrix algorithms for modeling layered diffraction gratings, the S-matrix algorithm and the R-matrix algorithm, are systematically presented in a form that is independent of the underlying grating models, geometries, and mountings. Many implementation variants of the algorithms are also presented. Their physical interpretations are given, and their numerical stabilities and efficiencies are discussed in detail. The single most important criterion for achieving unconditional numerical stability with both algorithms is to avoid the exponentially growing functions in every step of the matrix recursion. From the viewpoint of numerical efficiency, the S-matrix algorithm is generally preferred to the R-matrix algorithm, but exceptional cases are noted.

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Section: Introductionmentioning

confidence: 99%

Formulation and comparison of two recursive matrix algorithms for modeling layered diffraction gratings

1996

J. Opt. Soc. Am. A

864

555

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“…The result can violate the energy-balance criterion [10], but the introduction of new numerical algorithms has pointed out these numerical difficulties. In our work, we use the R-matrix algorithm developed in 1976 to study chemical reaction [11] and introduced in grating theory by Desandre and Elson [12] and Li [13]. The introduction of the global R-matrix algorithm and the determination of Rayleigh coefficients are detailed in Appendices A and B.…”

Section: Theorymentioning

confidence: 99%

Numerical study of photolithography system: electromagnetic differential method

Goumri‐Said

Salomon

Dufour

et al. 2004

Journal of Materials Processing Technology

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“…The resonance absorption by surface plasmon anomalies exists that the energy of the incident wave in diffraction efficiency by a Fourier grating with dielectric coating medium has been absorbed [3]. This resonance absorption depends on oscillation of the surface wave and the guided wave toward the period of the grating that has already been studied in details for the past decay [1][2][3].…”

Section: Introductionmentioning

confidence: 99%

“…The rigorous formulation of the diffraction problem by the Fourier grating with large thickness of the dielectric coating is described by using the T-matrix analysis [6] with the R-matrix expression [2]. If thickness of the coated dielectric layer is large, the absorption by the guided mode along the direction of Fourier grating is observed.…”

Section: Introductionmentioning

confidence: 99%

T-Matrix Analysis of Electromagnetic Wave Diffraction From a Dielectric Coated Fourier Grating

Ohki¹,

Sato²,

Matsumoto³

et al. 2005

PIER

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Abstract-This paper describes exactly a new formulation of the Tmatrix method with R-matrix expression for the electromagnetic wave diffraction efficiency from dielectric coated metallic Fourier grating. We found that the parameters of numerical calculation are widely applied by using R-matrix expression in dielectric coating media whose thickness or depth groove on the Fourier grating is large. The absorption phenomena of diffraction efficiency in particular incident angle are observed in the two cases. One of the factor is a guided mode in the dielectric coated layer. Other factor is resonance absorption that occurs by plasmon anomalies on the substrate for the TM polarization.

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Extinction-theorem analysis of diffraction anomalies in overcoated gratings

Cited by 41 publications

References 38 publications

Formulation and comparison of two recursive matrix algorithms for modeling layered diffraction gratings

Formulation and comparison of two recursive matrix algorithms for modeling layered diffraction gratings

Numerical study of photolithography system: electromagnetic differential method

T-Matrix Analysis of Electromagnetic Wave Diffraction From a Dielectric Coated Fourier Grating

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