We report the crystal structure and magnetic properties of spinel ferrite thin lms of magnetite, maghemite, and cobalt ferrite grown by reactive magnetron sputtering. The magnetic properties of spinel ferrite lms, in particular saturation magnetization, are affected by the growth conditions, even when no signi cant difference is found in the crystal structures. Comparing lms grown by molecular beam epitaxy with those produced by reactive magnetron sputtering, we found that the latter technique produces larger saturation magnetization than the bulk. Therefore, sputtering can be considered the suitable method for preparing various spinel ferrite compounds.