Eye-type scanning mirror with dual vertical combs for laser display

Ko, Young-Chul; Cho, Jinwoo; Mun, Yong-Kweun; Jeong, Hyun-Gu; Choi, Wooseok; Kim, Jung-Woo; Park, Yong-Hwa; Yoo, Ji-Beon; Lee, Jinho

doi:10.1016/j.sna.2005.10.013

Cited by 43 publications

(20 citation statements)

References 14 publications

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“…Many scanning micromirrors have been developed and demonstrated, and several different kinds of actuating systems have been discussed [2][3][4][5][6][7][8][9][10][11][12]. The actuating forces of mirror scanning are mainly classified into three types: electrostatic force, electromagnetic force, and piezoelectric force.…”

Section: Introductionmentioning

confidence: 99%

“…Electrostatic actuators are often used in MEMS scanners because of their compatibility with the silicon wafer process; however, they require a high voltage for actuation [2]. Recently, a comb-drive electrostatic actuator was used to decrease the driving voltage [3,4]. a Correspondence to: Takayuki Iseki.…”

Section: Introductionmentioning

confidence: 99%

“…To use a MEMS scanning device at both high speeds and wide angles, such as for a display, the resonant frequency of the torsional mode has been used for driving [2][3][4][5][6][7][8][9][10][11][12]. At the resonant frequency driving, the higher the quality factor (Q) of the device, the lower the required actuating force.…”

Section: Introductionmentioning

confidence: 99%

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High‐Speed and Wide‐Angle Deflection Optical MEMS Scanner Using Piezoelectric Actuation

Iseki¹,

Okumura²,

Sugawara³

2010

IEEJ Transactions Elec Engng

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A fast and wide deflection silicon-resonant torsional optical scanner driven by a piezoelectric actuator has been developed and patented. The scanner is composed of a 1-mm square mirror and two pairs of torsion beams and arms fabricated using microelectromechanical system (MEMS) processing of a silicon-on-insulator (SOI) wafer. According to calculations, at the same resonant driving frequency, the maximum principal stress of this structure was about one-third smaller than that of the usual structure having one pair of torsion beams. We achieved high frequency scanning of the optical beam with a large angular deflection up to 54 • at 38 kHz with a 5 V peak-to-peak applied voltage using the bulk piezoelectric stack actuator, and up to 17 • at 38 kHz with a 25 V peak-to-peak voltage using the unimorph actuator of a zinc oxide (ZnO) thin film. These results show that this scanner has the ability to perform the horizontal scanning for high-resolution extended graphics array (XGA) or super extended graphics array (SXGA) laser display. 

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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High‐Speed and Wide‐Angle Deflection Optical MEMS Scanner Using Piezoelectric Actuation

Iseki¹,

Okumura²,

Sugawara³

2010

IEEJ Transactions Elec Engng

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“…Micromirrors fabricated by MEMS technologies have been important building blocks for many micro-optical systems [1][2][3][4]. Particularly, two-dimensional (2D) MEMS free-space optical switch offering many fundamental advantages is one of the most common uses for small-and medium-scale applications.…”

Section: Introductionmentioning

confidence: 99%

16×16 Mirror type optical switch with integrated fiber alignment and steady switching state

Chen

Wang

et al. 2008

Micro & Optical Tech Letters

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triangular projection between the slab waveguide and the PhC one, unlike structures 1-3, so that we find that the projection is necessary for obtaining better transmission characteristic. CONCLUSIONSWe applied topology optimization with the FEM to improve the coupling between a slab waveguide and a PhC waveguide and obtained an optimized structure with excellent transmission characteristic in a small design region for the coupling. Also, we simplified the optimized structure of the coupling region for easier fabrication and were able to find some core features of the optimized structure. ACKNOWLEDGMENTSThe authors thank Prof. K. Svanberg for his computer codes of MMA.

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“…The micromachined scanner is a core device for optical applications [1,2]. The design considerations for scanner include large scan angle, high frequency response, and low driving voltages.…”

Section: Introductionmentioning

confidence: 99%