Fabrication and application of a stacked carbon electrode set including a suspended mesh made of nanowires and a substrate-bound planar electrode toward for an electrochemical/biosensor platform

Pyrolytic 3D Carbon Microelectrodes for Electrochemistry

“…Higher dose (D3 = 35 mJcm -2 and 42 mJcm -2 ) causes complete crosslinking of the SU-8 film (Figure 3.c, d). These results are in agreement with those obtained by Lim et al and demonstrate that the process window in terms of exposure dose is very narrow requiring precise control of the exposure conditions (16). The two steps of UV exposure followed by pyrolysis result in 3D carbon microstructures with various feature sizes (Figure 4).…”

“…The microelectrode chips were fabricated with multiple steps of UV photolithography followed by pyrolysis as shown schematically in Figure 1.a -e. First, the process of fabricating suspended layers from a single layer of SU-8 was optimized by adjusting the partial exposure dose (D3) (16). The optimized process was used to fabricate 3DCMEs on the working electrode of the microelectrode chips.…”

“…However, such an addition of Fe2O3 nanoparticles requires a number of preparation steps which severely limit the flexibility of the process. The most promising processes to define suspended layer so far are using a partial UV exposure of SU-8 photoresist films either at a lower wavelength (313nm) or/and a very low dose (15,16).…”

Circumferentially grown ZnO nanowire forest on a suspended carbon nanowire for a highly sensitive gas sensor

“…We introduced a novel fabrication method building a monolithic suspended single carbon nanowire using carbon-MEMS consisting of UV-lithography and the polymer pyrolysis [10][11][12]. Although the UV-lithography process defines a micro-sized photoresist structures , the micro-sized polymer structures is converted to a nano-sized glassy carbon structure owing to high volume reduction in pyrolysis.…”

Fabrication of a monolithic carbon mold for producing a mixed-scale PDMS channel network using a single molding process

“…The pyrolysis process in carbon MEMS converts micro-sized polymer structures into carbon nanostructures because of a dramatic volume reduction [15,16] so that batch fabrication of nano-sized molds (thickness = ~ 50 nm, width = ~ 500 nm) could be fabricated using conventional UV lithography. Therefore, two UV lithography processes using a thin photoresist layer and a thick photoresist layer respectively enables the formation of a semi-mixed-scale polymer structure, and the polymer structures can be converted into a monolithic carbon mixed-scale channel mold.…”