Fabrication and characterization of a PZT actuated micromirror with two-axis rotational motion for free space optics

Yee, Youngjoo; Bu, Jong Uk; Ha, Man-Hyo; Choi, Ji Il; Oh, Hee‐Mock; Lee, Sangshin; Nam, Hojung

doi:10.1109/memsys.2001.906542

Cited by 10 publications

(1 citation statement)

References 7 publications

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“…The doublegimballed torsional micromirror [3,4] is considered one of the key components for the realization of three-dimensional microelectromechanical system (MEMS) based OXC switches [5], as they can be scaled into the hundreds or thousands of ports with low loss and high uniformity. Different types of driving mechanisms have been applied in doublegimballed torsional micromirrors [6]. The most widely used one is electrostatic actuation, which offers many advantages including low power consumption, fast response time and simple drive electronics.…”

Section: Introductionmentioning

confidence: 99%

Macro-modelling of a double-gimballed electrostatic torsional micromirror

Zhou¹,

Tay²,

Chau³

2003

J. Micromech. Microeng.

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This paper presents the development of a reduced-order macro-model for the double-gimballed electrostatic torsional micromirror using the hierarchical circuit-based approach. The proposed macro-model permits extremely fast simulation while providing nearly FEM accuracy. The macro-model is coded in MAST analog hardware description language (AHDL), and the simulations are implemented in the SABER™ simulator. Both the static and dynamic behaviour of the double-gimballed electrostatic torsional micromirror have been investigated. The dc and frequency analysis results obtained by the proposed macro-model are in good agreement with CoventorWare™ finite element analysis results. Based on the macro-model we developed, system-level simulation of a closed-loop controlled double-gimballed torsional micromirror is also performed. Decentralized PID controllers are proposed for the control of the micromirror. A sequential-loop-closing method is used for tuning the multiple control loops during the simulation. After tuning, the closed-loop controlled double-gimballed torsional micromirror demonstrates an improved transient performance and satisfactory disturbance rejection ability.

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Section: Introductionmentioning

confidence: 99%

Macro-modelling of a double-gimballed electrostatic torsional micromirror

Zhou¹,

Tay²,

Chau³

2003

J. Micromech. Microeng.

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Piezoelectric actuated multiple channels optical switch

Wang

Hong-ru

2006

Analog Integr Circ Sig Process

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In this article, a novel multi-channel optical switch that is composed of a Y-shaped micromirror with two symmetrically reflective surfaces, a fixed pivot for mounting the micromirror, and a piezoelectric actuator to actuate the micromirror, is proposed. Working principle of this novel device is that the switching displacement of the reflective beam of light can be linearly controlled by the displacement of the piezoelectric actuator. Accordingly, the 1xN switching task can be easily achieved. To realize the proposed concept, UV-LIGA technique was implemented to fabricate the components. Multiple-switching concept was demonstrated through experiments. Efficiency of the proposed optical switch was investigated by computer simulations. Optical efficiency of the proposed device can be optimized if its dimensions are adequately designed

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Fabrication of an optical beam scanning array integrating mirror and lens arrays by passive self-alignment using precisely formed through-holes

Akashi¹,

Kanamaru²,

Kazama³

et al. 2005

J. Micromech. Microeng.

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An optical beam scanning array (OBSA) integrating two mirror arrays and a collimator-lens array was fabricated. The passive self-alignment inserting a pin into a through-hole was carried out for integration of the mirror arrays and the collimator-lens array. The mirror arrays consist of a mirror substrate with 35 single-axis-rotational mirrors and an electrode substrate for actuating the corresponding mirror by electrostatic force. Each substrate includes two kinds of through-holes: one for passing a collimated-optical beam through, the other for inserting a pin. The conditions for deep-reactive-ion etching (DRIE) of silicon were optimized to form through-holes suitable for passive self-alignment. DRIE from both surfaces of a silicon wafer under the optimized DRIE conditions—a C4F8/SF6 gas-flow ratio of 90% and a bias power in SF6 gas of 110 W—formed precision through-holes with an average undercut of 3.4 µm and an average sidewall angle of 89.9°. The passive self-alignment then yielded an assembly deviation of less than 17.5 µm, which meets the specification of less than 50 µm. This means that passive self-alignment using a through-hole formed under the optimized DRIE conditions can be exploited to make OBSAs without requiring optical alignment of mirrors and lenses.

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Fabrication and characterization of a PZT actuated micromirror with two-axis rotational motion for free space optics

Cited by 10 publications

References 7 publications

Macro-modelling of a double-gimballed electrostatic torsional micromirror

Macro-modelling of a double-gimballed electrostatic torsional micromirror

Piezoelectric actuated multiple channels optical switch

Fabrication of an optical beam scanning array integrating mirror and lens arrays by passive self-alignment using precisely formed through-holes

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