2017
DOI: 10.1155/2017/7326919
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Fabrication and Characterization of High-Sensitivity Underwater Acoustic Multimedia Communication Devices with Thick Composite PZT Films

Abstract: This paper presents a high-sensitivity hydrophone fabricated with a Microelectromechanical Systems (MEMS) process using epitaxial thin films grown on silicon wafers. The evaluated resonant frequency was calculated through finite-element analysis (FEA). The hydrophone was designed, fabricated, and characterized by different measurements performed in a water tank, by using a pulsed sound technique with a sensitivity of −190 dB ± 2 dB for frequencies in the range 50–500 Hz. These results indicate the high-perform… Show more

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Cited by 8 publications
(11 citation statements)
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“…A novel approach using HHT is proposed for joint bearing and range estimation of multiple targets based on a uniform linear array of hydrophones. In the past, a MEMS based acoustic linear uniform array of hydrophones for underwater application was proposed by our research team [ 17 , 23 ]. The micro hydrophone array has a very compact size, suitable for AUV operations.…”
Section: Discussionmentioning
confidence: 99%
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“…A novel approach using HHT is proposed for joint bearing and range estimation of multiple targets based on a uniform linear array of hydrophones. In the past, a MEMS based acoustic linear uniform array of hydrophones for underwater application was proposed by our research team [ 17 , 23 ]. The micro hydrophone array has a very compact size, suitable for AUV operations.…”
Section: Discussionmentioning
confidence: 99%
“…In order to find out the resonant frequency and sensitivity of the fabricated hydrophone, it is immersed into a water tank and connected to a signal generator. The underwater experimental setup [ 17 , 22 ] to measure the characteristics of the fabricated hydrophone is shown in Figure 6 . A calibrated hydrophone (B & K 8103) was employed.…”
Section: Experimental Approachmentioning
confidence: 99%
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“…The first use of piezoelectric material in underwater acoustic applications was reported in 1917 by a French physicist Paul Langevin, wherein quartz was used as the piezoelectric material in developing an underwater acoustic transducer useful in submarines detection. Since then, there has been extensive research in the field [4,5].…”
Section: Research Overview In Sensor Development Low-frequency Detectmentioning
confidence: 99%
“…With the development of MEMS technology, the new MEMS hydrophones with the advantages of miniaturization, integration and mass production have been proposed, which are very suitable for the small-size underwater vehicle [5,6]. A kind of MEMS vector hydrophone with cilium-four-beam microstructure was proposed by Zhang [7], which has a good sensitivity at low-frequency.…”
Section: Introductionmentioning
confidence: 99%