Fabrication and characterization of low pressure micro-resistojets with integrated heater and temperature measurement

Guerrieri, Daduí Cordeiro; Silva, Marsil A. C.; Zeijl, Henk van; Cervone, Angelo; Gill, Eberhard

doi:10.1088/1361-6439/aa90fb

Cited by 7 publications

(3 citation statements)

References 9 publications

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“…The choice of resistance type and manufacturing approach is also essential for the optimal conversion of electrical to thermal energy. Current designs show I sp of around 7∼39 s [163][164][165].…”

Section: Electrothermal Mems Electrical Thrustersmentioning

confidence: 99%

A Review on Micro-Combustion Flame Dynamics and Micro-Propulsion Systems

Dias,

Resende,

Afonso

2024

Energies

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This work presents a state-of-the-art review of micro-combustion flame dynamics and micro propulsion systems. In the initial section, we focus in on the different challenges of micro-combustion, investigating the typical length and time scales involved in micro-combustion and some critical phenomena such as flammability limits and the quenching diameter.We present an extensive collection of studies on the principal types of micro-flame dynamics, including flashback, blow-off, steady versus non-steady flames, mild combustion, stable flames, flames with repetitive extinction, and ignition and pulsatory flame burst. In the final part of this review, we focus on micropropulsion systems, their performance metrics, conventional manufacturing methods, and the advancements in Micro-Electro-Mechanical Systems manufacturing.

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Section: Electrothermal Mems Electrical Thrustersmentioning

confidence: 99%

A Review on Micro-Combustion Flame Dynamics and Micro-Propulsion Systems

Dias,

Resende,

Afonso

2024

Energies

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“…The heater chip, usually fabricated with MEMS manufacturing, contains a resistance to increase the temperature of the channels thus the energy of the particles in contact with the walls. Therefore, the geometry of the channels is a very important point to consider in the design in order to enhance the efficiency of the heat transfer to the gas and the overall efficiency of the thruster [45], [46]. The type of resistance and the manufacturing approach is also important to ensure an optimal conversion of electrical to thermal energy.…”

Section: Low-pressure Micro-resistojet -Lpmmentioning

confidence: 99%

A review of MEMS micropropulsion technologies for CubeSats and PocketQubes

et al. 2018

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CubeSats have been extensively used in the past decade as scientific tools, technology demonstrators and for education. Recently, PocketQubes have emerged as an interesting and even smaller alternative to CubeSats. However, both satellite types often lack some key capabilities, such as micropropulsion, in order to further extend the range of applications of these small satellites. This paper reviews the current development status of micropropulsion systems fabricated with MEMS (micro electro-mechanical systems) and silicon technology intended to be used in CubeSat or PocketQube missions and compares different technologies with respect to performance parameters such as thrust, specific impulse, and power as well as in terms of operational complexity. More than 30 different devices are analyzed and divided into 7 main categories according to the working principle. A specific outcome of the research is the identification of the current status of MEMS technologies for micropropulsion including key opportunities and challenges.

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“…Researchers introduced new materials and novel structures to improve the performance of pressure sensors at high temperatures. However, the traditional pressure sensor fabricated by doping produces leakage current at high temperatures, making the operating temperature below 125 • C [16][17][18]. Polysilicon high temperature pressure sensor adopts SiO 2 as a dielectric layer to achieve electrical isolation instead of positive-negative (PN) junction isolation, reducing the leakage of devices at high temperature [19,20].…”

Section: Introductionmentioning

confidence: 99%

Research on high temperature performance of pressure sensor

Zhao¹,

Pan²,

Memon³

et al. 2023

J. Micromech. Microeng.

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This work proposes a molybdenum (Mo) based pressure sensor capable of operating at temperatures higher than 300 ℃. The sensor utilizes a 30 μm thick rectangular pressure-sensitive film and 2 μm thick gate Mo resistors to form a Wheatstone bridge structure to enhance pressure sensing. Finite element analysis (FEA) has been performed to design the sensor and analyze the pressure and temperature effect. The developed sensor with the excitation of 1 V voltage exhibits excellent performance characteristics at room temperature (25 ℃), including a sensitivity of 0.05689 mV/V/kPa, 0.15 % Full Scale (FS) accuracy, a nonlinearity of 0.79 % FS, and 0.02 % FS repeatability. The thermal zero shift of -0.13 % FS/℃ is obtained in the 25 ℃ to 300 ℃ temperature range. The simulation findings illustrate that the thermal mismatch weakens the thermal zero shift by +0.012 ‰ FS/℃, while the deviation of the temperature coefficient of resistance (TCR) and initial resistivity (ρ_(T_0 )) aggravate the thermal zero shift by -0.139 % FS/℃. Among both, the deviation of ρ_(T_0 ) and TCR is the major contributor to thermal zero shift. Moreover, it was found that the Seebeck effect caused by the on-chip temperature gradient also affects the accuracy of the sensor. A temperature difference of 5.4 ℃ produces a thermoelectric potential of 37.95 μV equivalent to a pressure of 670 Pa loading on the chip. Besides, the response characteristics of the sensor at different temperature rates were investigated.

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Fabrication and characterization of low pressure micro-resistojets with integrated heater and temperature measurement

Cited by 7 publications

References 9 publications

A Review on Micro-Combustion Flame Dynamics and Micro-Propulsion Systems

A Review on Micro-Combustion Flame Dynamics and Micro-Propulsion Systems

A review of MEMS micropropulsion technologies for CubeSats and PocketQubes

Research on high temperature performance of pressure sensor

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