1996
DOI: 10.1021/ac9508816
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Fabrication and Characterization of Sputtered-Carbon Microelectrode Arrays

Abstract: This paper describes a robust and reliable process for fabricating a novel sputter-deposited, thin-film carbon microelectrode array using standard integrated circuit technologies and silicon micromachining. Sputter-deposited carbon films were investigated as potential candidates for microelectrode materials. The surface properties and cross section of the microelectrode arrays were studied by atomic force microscopy and scanning electron microscopy, respectively. Electrical site impedance, crosstalk, and lifet… Show more

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Cited by 89 publications
(63 citation statements)
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“…For example, they demonstrate steady state currents, higher sensitivity caused by the increased mass transport and application to highly resistant solutions. Additionally, UMEs have been applied as sensors in various techniques such as flow injection analysis [12,13], cardiovascular monitoring and organic compounds analysis [14][15][16]. For this work, we used the highly developed version of a classical cyclic voltammetric technique combined with fast Fourier transformation method (the computer program is more advanced in the algorithm for integration and filtering).…”
Section: Scheme 1 Chemical Structure Of Capmentioning
confidence: 99%
“…For example, they demonstrate steady state currents, higher sensitivity caused by the increased mass transport and application to highly resistant solutions. Additionally, UMEs have been applied as sensors in various techniques such as flow injection analysis [12,13], cardiovascular monitoring and organic compounds analysis [14][15][16]. For this work, we used the highly developed version of a classical cyclic voltammetric technique combined with fast Fourier transformation method (the computer program is more advanced in the algorithm for integration and filtering).…”
Section: Scheme 1 Chemical Structure Of Capmentioning
confidence: 99%
“…Well-adhering carbon thin-films with good electrochemical properties can either be obtained by high temperature pyrolysis [13][14][15][16] or by sputtering process in a DC or RF deposition mode [17][18][19]. With respect to the electrochemical behavior, the thin-film carbon microelectrodes are comparable to commercial glassy carbon ones [17,18]. For well-established thinfilm deposition procedures, the thin-film resistivities measured by the 4-points probe technique are comparable with the values for bulk materials ( Table 1).…”
Section: Technologymentioning
confidence: 99%
“…4 UMEs have been used as sensors for various applications, such as flowinjection analysis, 5,6 in cardiovascular monitoring 7 and analyzing organic compounds. 8,9 Another problem comes from changes in the characteristics of the electrode surface during a potential scan. If the solid electrode surface is oxidized and reduced during a voltammetric measurement, the electrode signal will have a large background current, which is associated with a high level of noise due to structural changes of the electrode surface.…”
Section: Introductionmentioning
confidence: 99%