Thin-Film Microfabrication of Electrochemical Transducers

Abstract

Thin-film technology provides definite advantages for producing small-dimension electrodes and electrochemical transducers. The aim of this review article is to describe the main technological steps of microfabrication. Three selected examples, derived from research in our laboratory, are used to illustrate basic concepts as well as some nonstandard processes available for the fabrication of thin-film Pt, Au, Ir and C microelectrodes.

Microfabricated Ultramicroelectrode Arrays: Developments, Advances, and Applications in Environmental Analysis

“…In the second approach, the previously patterned resist protects the underlying metal layer during subsequent etching processes. Wet-etching involves oxidationreduction reactions for metals and acid-base reactions for inorganic oxides [15]. Dry-etch methods encompass sputtering, plasma, or reactive ion etching.…”

Diffusion controlled analytical performances of hydrogen peroxide sensors: Towards the sensor with the largest dynamic range

“…To overcome this problem it is convenient to use micro-electrode arrays [7,8]. Despite in such arrays micro-electrodes are electronically connected to each other, the analytical properties of such ensembles are advantageous over those of conventional macroelectrode [9,10].…”

“…Micro-(and even nano-) electrode arrays are commonly produced with photolithography and electronic beam techniques by insulating of macro-electrode surface with subsequent drilling micro-holes in insulating layer [7,8]. Physical methods are, however, expensive and, besides that, unsuitable for sensor development in certain cases (for instance, for modification of lateral surface of needle electrodes).…”

Amperometric fluidic microchip array sensing device for nitric oxide determination in solution

“…Planar thin-film Pt microdisk array consisting of 36 microelectrode arrays was fabricated on a glass substrate using standard thin-film technology, as previously reported [9]. The microelectrodes have a diameter of 50 Am each and are separated by 500 Am (Fig.…”