Fabrication and design rules of three dimensional pyrolytic carbon suspended microstructures

Heikkinen, Joonas J.; Košir, Janez; Jokinen, Ville; Franssila, Sami

doi:10.1088/1361-6439/ab9f5b

Cited by 4 publications

(3 citation statements)

References 125 publications

(187 reference statements)

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“…The conductivity of graphitic films is about two or three orders of magnitude lower than the metal ones [23] however they have not been explored yet. Moreover, advantages of graphitic films include, but are not limited to chemical robustness, low density, ability to fabricate free-standing 3D structures [24] and ability to tune the conductivity in a wide range via the growth parameters. These features make graphitic films a good choice as an absorber material to increase the microbolometer sensitivity [25].…”

Section: Introductionmentioning

confidence: 99%

Ultra-broadband absorbance of nanometer-thin pyrolyzed-carbon film on silicon nitride membrane

Jorudas,

Rehman,

Cojocari

et al. 2024

Nanotechnology

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Fifty percents absorption by thin film, with thickness is much smaller than the skin depth and optical thickness much smaller than the wavelength, is a well-known concept of classical electrodynamics. This is a valuable feature that has been numerously widely explored for metal films, while chemically inert nanomembranes are a real fabrication challenge. Here we report the 20 nm-thin pyrolyzed carbon film (PyC) placed on 300 nm-thick silicon nitride (Si3N4) membrane demonstrating an efficient broadband absorption in the terahertz and near infrared ranges. While the bare Si3N4 membrane is completely transparent in the THz range, the 20 nm thick PyC layer increases the absorption of the PyC coated Si3N4 membrane to 40%. The reflection and transmission spectra in the near infrared region reveal that the PyC film absorption persists to a level of at least 10% of the incident power. Such a broadband absorption of the PyC film opens new pathways toward broadband bolometric radiation detectors.

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Section: Introductionmentioning

confidence: 99%

Ultra-broadband absorbance of nanometer-thin pyrolyzed-carbon film on silicon nitride membrane

Jorudas,

Rehman,

Cojocari

et al. 2024

Nanotechnology

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“…The relatively low electrical conductivity of PPF [10] does not rule out practical applications of these carbon films. Indeed, the chemical stability and robustness of PPFs are beneficial for biomedical [11][12][13], electrochemical [14][15][16] and microelectromechanical applications [17][18][19][20]. Moreover, PPF can be synthesized on silicon, silicon oxide and other substrates conventionally used in modern electronics and optoelectronics [17,18].…”

Section: Introductionmentioning

confidence: 99%

“…Indeed, the chemical stability and robustness of PPFs are beneficial for biomedical [11][12][13], electrochemical [14][15][16] and microelectromechanical applications [17][18][19][20]. Moreover, PPF can be synthesized on silicon, silicon oxide and other substrates conventionally used in modern electronics and optoelectronics [17,18]. The micro-and nanopatterned PPF-based structures can be created at a specified location on the substrate by using a pre-patterned photoresist significantly simplifying incorporating carbon electrodes into the semiconductor environment [21][22][23].…”

Section: Introductionmentioning

confidence: 99%

Pyrolyzed photoresist thin film: Effect of electron beam patterning on DC and THz conductivity

Jorudas,

Rehman,

Fedorov

et al. 2023

physics

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Pyrolyzed photoresist films (PPFs), which are formed via vacuum annealing of a photoresist without a catalyst, can be employed for fabrication of graphitic nanostructures by using conventional lithographic techniques. Such approach allows for reduction of technological steps required for fabrication of conductive micro- and nanoelectrodes for different applications. However, the operation frequency range of PPF electrodes is still unknown. Here, we report the results of the comparative study of PPF structures fabricated by electron beam lithography prior and after the annealing process with preference to the first approach. By performing the comparative measurements of PPF transport properties we found that both pre-and post-processed PPFs possess the same conductivities at dc-current and in the frequency range from 0.2 to 1.5 THz. Moreover, we achieved the sheet resistance of 150 nm thick PPFs as low as 570 Ω/sq, which is comparable to that of commercially available chemical vapour deposited (CVD) graphene. These findings open a path for a simple, reproducible and scalable fabrication of graphitic nanocircuits, nanoresonators and passive components suitable for applications in frequencies up to few terahertz.

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Perspectives on C-MEMS and C-NEMS biotech applications

Forouzanfar

Pala

Madou

et al. 2021

Biosensors and Bioelectronics

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Fabrication and design rules of three dimensional pyrolytic carbon suspended microstructures

Abstract: This thesis consists of an overview and of the following publications which are referred to in the text by their Roman numerals.

Cited by 4 publications

References 125 publications

Ultra-broadband absorbance of nanometer-thin pyrolyzed-carbon film on silicon nitride membrane

Ultra-broadband absorbance of nanometer-thin pyrolyzed-carbon film on silicon nitride membrane

Pyrolyzed photoresist thin film: Effect of electron beam patterning on DC and THz conductivity

Perspectives on C-MEMS and C-NEMS biotech applications

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