Fabrication and electromechanical properties of a self-actuating Pb(Zr0.52Ti0.48)O3 microcantilever using a direct patternable sol-gel method

Abstract

The use of direct-patternable lead zirconate titanate (PZT) films produced using photosensitive stock solutions with ortho-nitrobenzaldehyde and UV (365 nm) irradiation has reached an advanced stage of application in microdetection systems. Electromechanical properties of direct patterned PZT microcantilevers on SiNx∕Ta∕Pt∕PZT∕Pt∕SiO2 structure were measured by a laser vibrometer system as a function of cantilever length. The gravimetric sensitivity of cantilevers in air was characterized by Au deposition, and the mass detecting resolution was 38Hz∕ng. These results suggested a possibility that microelectromechanical systems may be fabricated relatively easily and without high cost processes, for example, by PZT dry etching.

Fabrication of sub 50-nm direct-patterned Pb(Zr,Ti)O3 films by electron beam-induced metal-organic deposition

“…The measured smaller P r might be associated with low crystalline quality and small grain size due to low annealing temperature, rough interface and possible interfacial mixing between ferroelectric layer and electrode by electron beam bombardment, generated depolarization field, and so on [15][16][17]. However, the P r value is somewhat comparable to the value obtained from direct- patterned PZT film formed using a photosensitive stock solution [18]. The capacitance-voltage (C-V) characteristics of the direct-patterned PZT films with pattern size of 500× 500 μm 2 with an applied voltage range from −10 to 10 V at 1 MHz are given in Fig.…”

Self-separated PZT thick films with bulk-like piezoelectric and electromechanical properties

“…Pb(Zr 0.52 Ti 0.48 )O 3 (PZT) films, with their perovskite structure, 1 have been extensively investigated because of their wide range of applications including microwave devices, 2 microcantilever sensors, 3 and medical imaging instruments. 4 The fact that PZT films have higher piezoelectric activity than other piezoelectric materials such as ZnO, GaN, and AlN, 5,6 makes them potential candidates for high frequency transducers.…”

Mechanical properties of sol–gel derived lead zirconate titanate thin films by nanoindentation

“…Recently, large attention has been given to lead zirconate titanate (PZT) thin films with respect to their potential applications in non-volatile ferroelectric random access memory (FRAM) and micro-electromechanical systems (MEMS) [1][2][3]. It is well known that piezoelectric coefficients depend on mechanical coefficients which are related to the mechanical states of materials [4].…”