The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) 2014 Help me understand this report
Fabrication and evaluation of silicon micromechanical resonator using neutral beam etching technology
Search citation statements
Paper Sections
Select...
Citation Types
0
0
0
Year Published
2016
2021
Publication Types
Select...
1
1
Relationship
0
2
Authors
Journals
Cited by 2 publications
References 18 publications
0
0
0
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.
Copyright © 2024 scite LLC. All rights reserved.
Made with 💙 for researchers
