Fabrication and performance of a micromachined 3-D solenoid inductor

Fang, Dongming; Wang, Xi-Ning; Zhou, Yong; Zhao, Xiaolin

doi:10.1016/j.mejo.2006.01.009

Cited by 13 publications

(6 citation statements)

References 7 publications

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“…8 and 9 that the used inductors with the trapezoid shaped (a=30 μm and b=40 μm) cross-section of the Ag coils, t of 30 μm, and the coil conductivity of 70% of Ag bulk value exhibit L of 8.2 nH, Q max of 35.5 near 750 MHz, and SRF of 5.14 GHz. These results are comparable to those reported in recent literature for various types of MEMS inductors developed using more complex fabrication processes [10][11][12][13][14]. The larger conductivity of the coil, thus smaller resistance of the coil resulted in the larger Q effects during high-frequency operation.…”

Section: Resultssupporting

confidence: 87%

“…In recent years, researchers have realized various highquality factor (Q) and self-resonant frequency (SRF) three-dimensional (3D) inductors using the complicated microelectromechanical systems (MEMS) technique [10][11][12][13][14]. Microinductors fabricated using MEMS techniques have Q of 6 to 55 at 1 GHz and L of 1.17 to 1.88 nH, and exhibit SRF of 2 to 10 GHz.…”

Section: Introductionmentioning

confidence: 99%

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Analytical estimation of high-frequency properties of RF micro-inductors prepared by direct-write techniques

et al. 2007

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In this work, the high-frequency characteristics of micron size, square spiral-type RF thin film air-core inductors prepared by direct-write supersonic jet deposition of laser ablated nanoparticle were estimated by a software package. The important parameters that are determined by direct-write process, such as the materials, the cross-section shape, the thickness, and the conductivity of the coil, were varied systematically to estimate the trend of the inductors' performances. The area dimensions of RF inductors utilized and the number of coil turns were 1.3 mm×1.3 mm and 3, respectively. The 96 wt% Al 2 O 3 , SiO 2 -coated Al 2 O 3 , and SiO 2 -coated Si wafers were used as the substrate material. The high-frequency characteristics of the inductance (L) and quality factor (Q) of the utilized inductors were simulated using a Maxwell three-dimensional field simulator (HFSS 8.5), which employs the finite element method. The used inductors, which have silver metal (Ag) coils, the trapezoid shaped cross-section of the coil, the coil thickness of 30 μm, and the coil conductivity of 70% of Ag bulk value, exhibit L of 8 to 9 nH. They also exhibit a maximum Q of 35.5 near the frequency of 750 MHz and a selfresonant frequency of 5.14 GHz. The simulated highfrequency data of the inductors were agreed well with those obtained from the equivalent circuit model of the utilized inductors.

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Section: Resultssupporting

confidence: 87%

Section: Introductionmentioning

confidence: 99%

Analytical estimation of high-frequency properties of RF micro-inductors prepared by direct-write techniques

et al. 2007

View full text Add to dashboard Cite

show abstract

“…In recent years, researchers have realized various high-Q and self-resonant frequency (SRF) 3D solenoid inductors using the complicated microelectromechanical systems (MEMS) technique [10][11][12][13][14]. Microinductors fabricated based on MEMS technique have Q of 6-55 at 1 GHz and exhibit the SRF of 2-10 GHz and L of 1.17-1.88 nH.…”

Section: Introductionmentioning

confidence: 99%

Microfabrication of solenoid-type RF SMD chip inductors with an Al2O3 core

Kim

Jung

Park

et al. 2008

Current Applied Physics

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“…The inductance increases from 15 to 21 nH at a frequency of 1.5 GHz for an increased width, while the quality factor is not too much influenced by changes in the width. Ideally, with a stable number of turn and the same gap between the two adjoining coils, the enlarged magnetic core width results in longer coils, leading to a higher resistance loss and diminish quality factor [20]. Figure 6 shows the plots of quality factor and inductance variation versus frequency for gaps between the neighboring winding equal to 20μm and 15μm.…”

Section: Influence Of the Number Of Turnsmentioning

confidence: 99%

Design and modeling of solenoid inductor integrated with FeNiCo in high frequency

Namoune¹,

Taleb

Mansour

2020

TELKOMNIKA

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In this work, the design and modeling of the solenoid inductor are discussed. The layout of integrated inductors with magnetic cores and their geometrical parameters are developed. The quality factor Q and inductance value L are derived from the S-parameters and plotted versus frequency. The effect of solenoid inductor geometry on inductance and quality factor are studied via simulation using MATLAB. The solenoid inductor geometry parameters considered are the turn's number, the magnetic core length, the width of a magnetic core, the gap between turns, the magnetic core thickness, the coil thickness, and solenoid inductor oxide thickness. The performance of the proposed solenoid inductor integrated with FeNiCo is compared with other solenoid inductors.

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Fabrication and performance of a micromachined 3-D solenoid inductor

Cited by 13 publications

References 7 publications

Analytical estimation of high-frequency properties of RF micro-inductors prepared by direct-write techniques

Analytical estimation of high-frequency properties of RF micro-inductors prepared by direct-write techniques

Microfabrication of solenoid-type RF SMD chip inductors with an Al2O3 core

Design and modeling of solenoid inductor integrated with FeNiCo in high frequency

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