“…Many methods have been developed to prepare PZT films and ceramics, such as radio frequency (RF) magnetron sputtering [3], pulsed laser deposition (PLD) [4], metal-organic chemical vapor deposition (MOCVD) [5], sol-gel [6][7][8][9][10][11], screen-print [12,13], chemical solution deposition [14], solid state process [15], etc. Among them, sol-gel is an attractive technique for fabricating PZT films due to its good compatibility with MEMS technology, precise control of the homogeneity of composition, ease of use and low cost for fabricating thin films with large area.…”