Fabrication antireflection (AR) coatings for P-polarized 193nm laser light at an incidence angle of 74°

Jin, Jingcheng; Jin, Chan; Li, Chun; Chang, Yanhe

doi:10.1016/j.optcom.2013.02.005

Cited by 2 publications

(1 citation statement)

References 8 publications

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“…Such excimer lasers are being developed for higher output power, repetition rates, enhancements on beam homogeneity, and pulse stability, feeding an ever-growing demand for the coating components working at this wavelength range [2][3][4][5].…”

Section: Introductionmentioning

confidence: 99%

Influence of substrate temperatures on the properties of GdF_3 thin films with quarter-wave thickness in the ultraviolet region

Jin

et al. 2015

Appl. Opt.

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High-quality coatings of fluoride materials are in extraordinary demand for use in deep ultraviolet (DUV) lithography. Gadolinium fluoride (GdF₃) thin films were prepared by a thermal boat evaporation process at different substrate temperatures. GdF₃ thin film was set at quarter-wave thickness (∼27 nm) with regard to their common use in DUV/vacuum ultraviolet optical stacks; these thin films may significantly differ in nanostructural properties at corresponding depositing temperatures, which would crucially influence the performance of the multilayers. The measurement and analysis of optical, structural, and mechanical properties of GdF₃ thin films have been performed in a comprehensive characterization cycle. It was found that depositing GdF₃ thin films at relative higher temperature would form a rather dense, smooth, homogeneous structure within this film thickness scale.

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Section: Introductionmentioning

confidence: 99%

Influence of substrate temperatures on the properties of GdF_3 thin films with quarter-wave thickness in the ultraviolet region

Jin

et al. 2015

Appl. Opt.

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Intensity profile of light scattered from a rough surface

2013

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We present in this paper, approximate analytical expressions for the intensity of light scattered by a rough surface, whose elevation ξ(x,y) in the z-direction is a zero mean stationary Gaussian random variable. With (x,y) and (x^',y^') being two points on the surface, we have 〈ξ(x,y)〉=0 with a correlation, 〈ξ(x,y)ξ(x^',y^')〉=σ²g(r), where r=[(x-x^')²+(y-y^')²]^1/2 is the distance between these two points. We consider g(r)=exp[-(r/l)^β] with 1≤β≤2, showing that g(0)=1 and g(r)→0 for r≫l. The intensity expression is sought to be expressed as f(v_xy)={1+(c/2y)[vx2+vy2]}^-y, where v_x and v_y are the wave vectors of scattering, as defined by the Beckmann notation. In the paper, we present expressions for c and y, in terms of σ, l, and β. The closed form expressions are verified to be true, for the cases β=1 and β=2, for which exact expressions are known. For other cases, i.e., β≠1, 2 we present approximate expressions for the scattered intensity, in the range, v_xy=(vx2+vy2)^1/2≤6.0 and show that the relation for f(v_xy), given above, expresses the scattered intensity quite accurately, thus providing a simple computational methods in situations of practical importance.

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Fabrication antireflection (AR) coatings for P-polarized 193nm laser light at an incidence angle of 74°

Cited by 2 publications

References 8 publications

Influence of substrate temperatures on the properties of GdF_3 thin films with quarter-wave thickness in the ultraviolet region

Influence of substrate temperatures on the properties of GdF_3 thin films with quarter-wave thickness in the ultraviolet region

Intensity profile of light scattered from a rough surface

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