Fabrication, modelling and characterization of MEMS piezoelectric vibration harvesters

Renaud, M.; Karakaya, K.; Sterken, Tom; Fiorini, Paolo; Hoof, Chris Van; Puers, Robert

doi:10.1016/j.sna.2007.11.005

Cited by 220 publications

(119 citation statements)

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“…Piezoelectric harvesters based on aluminum nitride (AIN) have returned up to 60 W, with a footprint smaller than 1 cm [16]; this power, however, is obtained with unpackaged devices and could significantly decrease once the harvesters are packaged. Piezoelectric harvesters based on lead zirconate titanate (PZT) have obtained up to 40 W [17].…”

Section: A Kineticmentioning

confidence: 99%

“…An important parameter to be considered, when the power source is close to the body, is the specific absorption rate (SAR) of the tissues (17) where and are the conductivity and the density of the involved tissues, respectively, and is the norm of the incident electric field. The SAR value, measured in watts per kilogram, determines the quantity of power absorbed by the tissues and is strictly related to their temperature increase.…”

Section: Specific Absorption Ratementioning

confidence: 99%

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Energy Harvesting and Remote Powering for Implantable Biosensors

2011

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Abstract-This paper reviews some popular techniques to harvest energy for implantable biosensors. For each technique, the advantages and drawbacks are discussed. Emphasis is placed on the inductive links that are able to deliver power wirelessly through the biological tissues and enable bidirectional data communication with the implanted sensors. Finally, high-frequency inductive links are described, focusing also on the power absorbed by the tissues.Index Terms-Energy harvesting, implantable biosensors, inductive powering, remote powering.

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Section: A Kineticmentioning

confidence: 99%

Section: Specific Absorption Ratementioning

confidence: 99%

Energy Harvesting and Remote Powering for Implantable Biosensors

2011

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“…The operational efficiency of a vibrational piezoelectric cantilever integrated into a microelectromechanical system (MEMS) has been investigated both experimentally 5 and theoretically. 6 The characteristic of a piezoelectric power MEMS is determined by material factors, such as the piezoelectric coefficients (e ij ), dielectric constants (ε), electromechanical coupling (k), and mechanical quality factor (Q) of the applied piezoelectric material. The power output of a MEMS is proportional to the piezoelectric response, but decreases with higher ε.…”

Section: Introductionmentioning

confidence: 99%

Volume matching condition to establish the enhanced piezoelectricity in ternary (Sc,Y)0.5(Al,Ga,In)0.5N alloys

et al. 2013

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Recently, ScAlN alloys attracted attention for their giant piezoelectric moduli. In this study the piezoelectric response of the wurtzite group-III nitrides AlN, GaN, and InN mixed with 50 mol% of ScN or YN is investigated using ab initio calculations. We confirm that the energy flattening phenomenon gives rise to the simultaneous appearance of elastic softening and local structural instability, and explains the enhanced piezoelectricity of the alloys. Furthermore, we present a volume matching condition for an efficient search of new piezoelectric materials. It states that alloys in which the parent components show close volume matching exhibit a flatter potential-energy landscape and higher increase of piezoelectric moduli. We suggest YInN, beyond ScAlN, as a promising material for piezoelectric energy harvesting with its enhanced ≈400% piezoelectric moduli.

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“…Another parameter of interest in the design of thinfi lm harvesters is the generalized electromechanical coupling (GEMC) factor, K . 20 The GEMC factor is obtained from the equation:…”

Section: Vibration Kinematicsmentioning

confidence: 99%

“…In this measurement, the GEMC, K 2 , was calculated to be 1.3 × 10 −2 , which is much larger than the value for polycrystalline PZT thin fi lms on Si substrates. 20 This result was attributed to the large electromechanical coupling coefficient k 31 of c -axis oriented epitaxial PZT thin fi lms. The output power increased monotonically with acceleration, reaching 244 μ W at 50 m/s 2 .…”

Section: Grain Textured and Epitaxial Piezoelectric Fi Lmsmentioning

confidence: 99%