This paper proposes a new approach towards mechanical waste energy scavenging, using a micromachined electrostatic converter. The device consists of a vibration sensitive variable capacitor polarized by an electret. The variation of the capacitance results in a current through a load circuit. A physical model of the device is described; in order to obtain a closed form expression for the converted power a linear model is presented. This model shows that 50 pW can be generated with a 5 p n vibration. A first prototype design based on a SO1 MPW-service is proposed.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.