Fabrication of 3-nm-thick Si3N4 membranes for solid-state nanopores using the poly-Si sacrificial layer process

Yanagi, Itaru; Ishida, Tadao; Fujisaki, Koji; Takeda, Kenta

doi:10.1038/srep14656

Cited by 54 publications

(47 citation statements)

References 49 publications

(96 reference statements)

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“…Thinning the membrane is important for high vertical resolution, but an ultrathin membrane has the risk of fracture. Yanagi et al developed a new fabrication process that employs a polycrystalline-Si (poly-Si) sacrificial layer providing mechanical robustness to the membrane [126]; the effective thickness of the nanopores was estimated to range from 0.6 to 2.2 nm with diameter smaller than 2 nm [127]. A SiN nanopore with a 0.5-nm diameter at the waist was sputtered using a tightly focused, high-energy electron beam in a scanning transmission electron microscope (STEM) [107,108,128].…”

Section: Discussionmentioning

confidence: 99%

Application of Solid-State Nanopore in Protein Detection

Luo

et al. 2020

IJMS

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A protein is a kind of major biomacromolecule of life. Its sequence, structure, and content in organisms contains quite important information for normal or pathological physiological process. However, research of proteomics is facing certain obstacles. Only a few technologies are available for protein analysis, and their application is limited by chemical modification or the need for a large amount of sample. Solid-state nanopore overcomes some shortcomings of the existing technology, and has the ability to detect proteins at a single-molecule level, with its high sensitivity and robustness of device. Many works on detection of protein molecules and discriminating structure have been carried out in recent years. Single-molecule protein sequencing techniques based on solid-state nanopore are also been proposed and developed. Here, we categorize and describe these efforts and progress, as well as discuss their advantages and drawbacks.

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Section: Discussionmentioning

confidence: 99%

Application of Solid-State Nanopore in Protein Detection

Luo

et al. 2020

IJMS

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“…Owing to the thickness of materials, dozens of bases can pass solid-state nanopores at a time. At present, the thinnest silicon nitride nanopore is 3 nm, which still does not distinguish the four kinds of base [17].…”

Section: Spatial Resolutionmentioning

confidence: 91%

Controlling DNA Translocation Through Solid-state Nanopores

et al. 2020

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Compared with the status of bio-nanopores, there are still several challenges that need to be overcome before solid-state nanopores can be applied in commercial DNA sequencing. Low spatial and low temporal resolution are the two major challenges. Owing to restrictions on nanopore length and the solid-state nanopores' surface properties, there is still room for improving the spatial resolution. Meanwhile, DNA translocation is too fast under an electrical force, which results in the acquisition of few valid data points. The temporal resolution of solid-state nanopores could thus be enhanced if the DNA translocation speed is well controlled. In this mini-review, we briefly summarize the methods of improving spatial resolution and concentrate on controllable methods to promote the resolution of nanopore detection. In addition, we provide a perspective on the development of DNA sequencing by nanopores.

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“…We also find effectively better signal-to-noise, as we see deeper translocation events at higher voltages. We understand the trend in ΔG and Δt as a function of voltage based on the existing model [41,42,43] for the salt conditions used in our experiments. Pore conductance during DNA translocation is reduced due to exclusion of ions in pore by the excluded volume of the DNA.…”

Section: Dna Translocation Through Low-noise Borosilicate Nanoporesmentioning

confidence: 99%

Fabrication of Low Noise Borosilicate Glass Nanopores for Single Molecule Sensing

Bafna

Soni

2016

Biophysical Journal

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We show low-cost fabrication and characterization of borosilicate glass nanopores for single molecule sensing. Nanopores with diameters of~100 nm were fabricated in borosilicate glass capillaries using laser assisted glass puller. We further achieve controlled reduction and nanometer-size control in pore diameter by sculpting them under constant electron beam exposure. We successfully fabricate pore diameters down to 6 nm. We next show electrical characterization and low-noise behavior of these borosilicate nanopores and compare their taper geometries. We show, for the first time, a comprehensive characterization of glass nanopore conductance across six-orders of magnitude (1M-1μM) of salt conditions, highlighting the role of buffer conditions. Finally, we demonstrate single molecule sensing capabilities of these devices with real-time translocation experiments of individual λ-DNA molecules. We observe distinct current blockage signatures of linear as well as folded DNA molecules as they undergo voltage-driven translocation through the glass nanopores. We find increased signal to noise for single molecule detection for higher trans-nanopore driving voltages. We propose these nanopores will expand the realm of applications for nanopore platform.

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Fabrication of 3-nm-thick Si3N4 membranes for solid-state nanopores using the poly-Si sacrificial layer process

Cited by 54 publications

References 49 publications

Application of Solid-State Nanopore in Protein Detection

Application of Solid-State Nanopore in Protein Detection

Controlling DNA Translocation Through Solid-state Nanopores

Fabrication of Low Noise Borosilicate Glass Nanopores for Single Molecule Sensing

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