2015
DOI: 10.1364/oe.23.000121
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Fabrication of 3D photonic components on bulk crystalline silicon

Abstract: We have fabricated three dimensional photonic components such as waveguides and beam splitters from crystalline silicon using a process based on one or more ion irradiation steps with different energies and fluences, followed by electrochemical anodization and thermal annealing. We first demonstrate the fabrication of multilevel silicon waveguides and then extend this process to make multilevel beam splitters, in which three output waveguides are distributed over two depths. The dimensions of the waveguides ca… Show more

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Cited by 8 publications
(2 citation statements)
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“…Micromachined/Nano machined chip PCR: PCR amplification is necessary for applications of integrated microchips in genetic analysis. Micromachined/nanomachined [22,23] DNA PCR chips with different groove depths can be fabricated in glass, silicon and plastic [24,25]. Microchip PCR machines have advantages of minute sample consumption, simultaneous analysis of large number of samples and enhanced integration ability with the supporting equipment.…”
Section: A Typical Pcr Machinesmentioning
confidence: 99%
“…Micromachined/Nano machined chip PCR: PCR amplification is necessary for applications of integrated microchips in genetic analysis. Micromachined/nanomachined [22,23] DNA PCR chips with different groove depths can be fabricated in glass, silicon and plastic [24,25]. Microchip PCR machines have advantages of minute sample consumption, simultaneous analysis of large number of samples and enhanced integration ability with the supporting equipment.…”
Section: A Typical Pcr Machinesmentioning
confidence: 99%
“…[16] Some of these centers are recognized as high-brightness single-photon sources with remarkable nuclear spin attributes and excellent coherence, suggesting diamond has appealing characteristics that can be exploited in quantum information processing technologies and quantum photonics applications. [17][18][19] In contrast, a variety of latest scientific research achievements such as 3D memories, [20] 3D photonic components, [21] and 3D nonlinear photonic crystals [22] were aiming to break present limitations of planar micro-/nanotechnologies. 3D multilevel architectures avoid overlap in planar geometries via vertical stacking, thus overcoming physical space limitations in 2D planes.…”
Section: Introductionmentioning
confidence: 99%