Ion-implanted waveguides were directly written in bulk single-crystal diamond by scanning a focused 2 MeV proton beam. By controlling the fluence and the lateral size of the proton beam, a bright and near-circular single-mode profile was observed. Propagation loss and effective refractive index of the guided mode were measured by the Fabry-Pérot technique, confirming single-mode guiding. Micro-Raman maps of the waveguides were used to visualize damage profiles and defect distributions induced by the proton beam. The demonstration of single-mode light guiding in our waveguides shows that direct proton beam writing is a promising tool in the rapid manufacture of integrated optical circuits in bulk diamond.

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Cross-sectional Raman/photoluminescence hyperspectral imaging was employed to study the formation and annealing behavior of optical centers in diamond, which was implanted by a focused 2 MeV proton beam. The resulting compact implantation profiles, together with the submicron spatial resolution of the hyperspectral imaging technique, produced detailed distributions of the nitrogen-vacancy centers and the TR12 center. In addition, cluster analysis was used to identify a split in the implantation end of range into two subregions, each with its own characteristic emission spectrum centered at 543 nm and 552 nm. We demonstrate that our analysis methodology on the hyperspectral dataset, paired with the use of focused beam implantation, provides a renewed understanding of defect formation and lattice damage in ion-implanted single crystal diamond.