All-silicon subwavelength structural coloration fabricated through proton beam writing and reactive ion etching

Gong, Jing; Jin, Huining; Yang, Chengyuan; Bettiol, Andrew A.; Kan, J.A. van

doi:10.1016/j.nimb.2020.03.001

Cited by 6 publications

(3 citation statements)

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“…An alternative is to use dielectrics/semiconductors with low optical losses that support Mie resonances. [96][97][98][99][100][101][102][103][104][105][106][107][108] High-refractive-index dielectrics/semiconductors such as silicon (Si) and titanium oxide (TiO 2 ) support resonances and are typically called Mie resonators, in that they can be described 8 by Mie theory (though metallic particles supporting LSPR can be modeled by Mie theory as well). [109][110][111][112][113][114][115][116][117][118][119][120] The fundamental multipoles (i.e., electric dipole, magnetic dipole) in the Mie resonances can produce high-quality-factor resonances (in a material with a refractive index larger than 2), due to the negligible intrinsic loss.…”

Section: Structural Color Generation Methods and Relevant Applicationsmentioning

confidence: 99%

“…In addition, Au and Ag are not compatible with complementary-metal–oxide–semiconductor (CMOS) processes and cannot be incorporated into semiconductor manufacturing processes. An alternative is to use dielectrics/semiconductors with low optical losses that support Mie resonances. − …”

Section: Structural Color Generation Methods and Relevant Applicationsmentioning

confidence: 99%

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Nanophotonic Structural Colors

et al. 2020

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Structural colors traditionally refer to colors arising from the interaction of light with structures with periodicities on the order of the wavelength. Recently, the definition has been broadened to include colors arising from individual resonators that can be subwavelength in dimension, e.g., plasmonic and dielectric nanoantennas. For instance, diverse metallic and dielectric nanostructure designs have been utilized to generate structural colors based on various physical phenomena, such as localized surface plasmon resonances (LSPRs), Mie resonances, thin-film Fabry-Pérot interference, and Rayleigh-Wood diffraction anomalies from 2D periodic lattices and photonic crystals. Here, we provide our perspective of the key application areas where structural colors really shine, and other areas where more work is needed. We review major classes of materials and structures employed to generate structural coloration and highlight the main physical resonances involved.

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Section: Structural Color Generation Methods and Relevant Applicationsmentioning

confidence: 99%

Section: Structural Color Generation Methods and Relevant Applicationsmentioning

confidence: 99%

Nanophotonic Structural Colors

et al. 2020

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“…The proton beam writing (PBW) beamline at the Centre for Ion Beam Application (CIBA) in Singapore [23][24][25][26] is a state-of-the-art powerful direct-write implantation facility holding tremendous potential for in bulk diamond micro-/nanostructuring. The 3.5 MV high energy singletron accelerator in CIBA has a superior beam energy stability of around AE20 eV.…”

Section: Methodsmentioning

confidence: 99%

Cross‐Sectional Investigation of Multihigh‐Energy Proton‐Implanted Single Crystalline Diamond

Gong

Ansari²,

Jin

et al. 2020

Physica Status Solidi (a)

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Comprehending the implantation‐related characteristic quantities of multihigh‐energy proton irradiation of diamond is of significant technological interest for sensing applications, fabrication of 3D photonic crystals, and color centers (e.g., NV− center)‐based quantum computing. Herein, proton‐projected ranges and defect distributions in the (010) plane (Y‐normal plane) of microwave plasma chemical vapor deposition (MPCVD)‐grown diamond irradiated with 0.5–2.0 MeV proton (H+ or molecular normalH2+ ions) in a nonchanneling (near [001], Z‐axis) direction, are experimentally measured via cross‐sectional optical microscopy and high‐resolution confocal Raman spectroscopy mapping. It is found that the projected ranges of the experimental findings and the simulation results indicate good consistencies, whereas there is considerable disagreement between them in regards to longitudinal straggling and lateral straggling. Based on the comparisons and analyses, a clear view of protons implanted in single crystalline diamond in the high‐energy range theoretically and experimentally is obtained.

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