Fabrication of a 128$\,\times\,$128 Pixels Charge Transfer Type Hydrogen Ion Image Sensor

Abstract

The charge transfer technique, which is capable of operating in charge accumulation-mode, is suitable for use in pH-imaging to detect small changes in potential. An advanced charge-transfer-type hydrogen ion image sensor consisting of 128 × 128 pixels with a 23-µm pixel pitch is fabricated. A new scanning system and high-performance drive buffer circuits are adopted to achieve high frame rates. For miniaturization of the sensor pixels, we developed an advanced new fabrication process. The pH sensitivity is 32.8 mV/pH when using standard pH solutions. Videos of the movement of hydrogen ions are clearly obtained with the 128 × 128 pixels display, and photo images are taken simultaneously with the videos of the movement of hydrogen ions. A frame rate of 58 frames per second is realized with this image sensor.

Real-time monitoring of inhibitory effects on glutamate-induced neurotransmitter release using a potassium ion image sensor

“…Hippocampal slices were extracted from the brains of anesthetized neonatal rats according to a previously described method 12,13 . Each slice was approximately 400 m thick.…”

“…Furthermore, a 32 × 32 pixel array of potassium ion-and sodium ion-sensitive image sensors has been successfully fabricated by applying an ion-selective membrane to a sensor; this sensor enables real-time imaging of K + and Na + concentrations in solution 10,11 . Moreover, to improve spatial resolution, we constructed a high-spatial resolution charge-coupled device ion-image sensor with a 128 × 128 pixel array 12 . This high-resolution image sensor has an image area of 4.8 mm × 4.8 mm and a spatial resolution of 37 m × 37 m.…”

Formation and fluidity measurement of supported lipid bilayer on polyvinyl chloride membrane

“…[6][7][8][9] The component of the mixture solution for the fabrication of the plasticized PVC membrane is summarized in Table 1. It was slightly modified with the previous studies in refs.…”

“…An interdisciplinary example of the application of the ion-selective PVC membrane is the ion sensors based on field effect transistor (FET) 4,5 and charge-coupleddevice (CCD). [6][7][8][9] These ion sensors based on microelectronic devices measure the change of the surface potential of the sensing region due to the ion concentration in the solution as a shift in the drain current or voltage, and as a quantity of electric charges, respectively. The PVC membranes incorporating ionophores convert the ion concentration in the bulk solution to the surface potential change depending on the binding constant between the ionophore and its target ion.…”

Reduced signal crosstalk multi neurotransmitter image sensor by microhole array structure

“…Experimental procedure 2.1 Fabrication of the microhole array structure on an image sensor The multi neurotransmitter image sensor consists of a microhole array structure on a H + image sensor of 128 × 128 pixels, which has a 23-µm-pixel pitch and a sensitivity of 32.8 mV=pH. 20) The proposed microhole array structure was constructed using SU-8 as the negative photosensitive material (Nippon Kayaku) and a photolithography technique with a mask aligner (SUSS Micro Tec MA6 BSA) by a previously reported process. 22) The hole size was 24.5 × 31.6 µm 2 , and sensors with the array structures of three different heights of 0, 15, and 60 µm were prepared.…”