2003
DOI: 10.1088/0022-3727/36/21/l01
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Fabrication of a carbon nanotube-based gas sensor using dielectrophoresis and its application for ammonia detection by impedance spectroscopy

Abstract: This paper describes a new method for fabricating a gas sensor composed of multi-wall carbon nanotubes (MWCNTs) using dielectrophoresis (DEP). MWCNTs dispersed in ethanol were trapped and enriched in an interdigitated microelectrode gap under the action of a positive DEP force that drove the MWCNTs to a higher electric field region. During the trapping of MWCNTs, the electrode impedance varied as the number of MWCNTs bridging the electrode gap increased. After the DEP process, the ethanol was evaporated and th… Show more

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Cited by 288 publications
(148 citation statements)
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“…Among all harmful gasses, NO 2 is a well-known toxic gas and air pollutant and monitoring its concentration is crucial for air quality monitoring. Prolonged exposure to low concentration of NO 2 capable of causing several health hazards such as coronary artery disease as well as stroke [5][6]. The sensitivity of SWNTs towards NO 2 at atmospheric temperature as reported [1] is particularly interesting.…”
Section: Introductionmentioning
confidence: 93%
“…Among all harmful gasses, NO 2 is a well-known toxic gas and air pollutant and monitoring its concentration is crucial for air quality monitoring. Prolonged exposure to low concentration of NO 2 capable of causing several health hazards such as coronary artery disease as well as stroke [5][6]. The sensitivity of SWNTs towards NO 2 at atmospheric temperature as reported [1] is particularly interesting.…”
Section: Introductionmentioning
confidence: 93%
“…Figure 3 gives the shape of the device. The detection of a clamped circular shape under a uniform pressure P is denoted by w and is given by [8]:…”
Section: The Pressure Sensormentioning
confidence: 99%
“…However, the number of nanotubes is not well controlled and their orientations are random. Dielectrophoresis (DEP) technique using ac electric fields (Suehiro et al 2003), (Gelamo et al, 2009a) has proven to be a very efficient technique for deposition of aligned nanotubes in desired position between metallic electrodes. In a DEP process, elongated polarized objects are aligned and attracted to the area of strongest electric field (Pohl, 1978).…”
Section: Deposition Techniques -Dielectrophoresismentioning
confidence: 99%
“…To improve sensitivity, large area interdigitated electrodes can be used, with the gaps filled with a big number of nanotubes. This kind of devices has been successfully used to detect gases and organic vapors, including at room temperature, at mW power consumption (Li et al 2003), (Suehiro, Zhou and Hara 2003). In principle, the MWCNTs based sensors must be less sensitive than those based on SWCNTs, as the measured current (and the associated noise) is supposed to pass through the whole volume of a MWCNT including all internal walls, whereas the reaction with gases should affect mainly the current fraction through the outermost wall.…”
Section: Introductionmentioning
confidence: 99%