Fabrication of a graphene-based pressure sensor by utilising field emission behavior of carbon nanotubes

Habibi, Maryam; Darbari, Sara; Rajabali, Shima; Ahmadi, Vahid

doi:10.1016/j.carbon.2015.09.059

Cited by 33 publications

(20 citation statements)

References 29 publications

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“…Except for the pressure sensor using resonance frequencies, the sensitivity of GNR3 was much larger than those of popular pressure sensors using piezoresistivity. 2 – 5 We also measured the sensor activity of GNR3 in the pressure range between 10 −3 to 8 × 10 −7 Torr. Although the detailed results are not provided in this report because of the ions produced by the hot cathode ion-gauge interrupted the pressure reading of the GNR3 sensor, Fig.…”

Section: Resultsmentioning

confidence: 99%

Ultra-sensitive graphene sensor for measuring high vacuum pressure

Ahn

Jung

Choi

et al. 2017

Sci Rep

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We demonstrate here that several different graphene nanoribbon (GNR) samples can be separated from the GNR mixture synthesized by conventional methods. The sheet resistance of the purified GNR gradually decreased with decreasing pressure at 30 °C, whereas it increased at 100 °C. A hypothesis based on van der Waals attractive interactions between GNR sheets was introduced to explain this finding. This hypothesis verified by the shifted main peaks in vacuum X-ray diffraction spectra: 0.022 nm and 0.041 nm shifts were observed for reduced graphene oxide (RGO) and GNR, respectively. Theoretical calculations indicated that, for RGO, the shifted distance was similar to the calculated distance. The response of the GNR sensor to pressure changes occurred rapidly (in seconds). The normalized response time of each sample indicated that sensor using GNR reduced the tailing of the response time by shortening the diffusion path of gas molecules. The sensitivity of the GNR sensor was three times that of RGO in the given pressure range. Moreover, the sensitivity of GNR was much larger than those of the most popularly studied pressure sensors using Piezoresistivity, and the sensor could detect vacuum pressures of 8 × 10–7 Torr.

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Section: Resultsmentioning

confidence: 99%

Ultra-sensitive graphene sensor for measuring high vacuum pressure

Ahn

Jung

Choi

et al. 2017

Sci Rep

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“…PDMS with small modulus is commonly used for wearable capacitive tactile sensors. Highly sensitive capacitor‐type sensors based on simple PDMS as the dielectric with CNTs or PEDOT: PSS as electrodes have been widely reported . For example, a flexible capacitive‐type tactile sensor based on hierarchically designed elastic CNT fabrics that combine tensile elastomer with good dielectric properties on PDMS was reported .…”

Section: Wearable Sensor Applicationsmentioning

confidence: 99%

Recent Progress of Self‐Powered Sensing Systems for Wearable Electronics

Lou

Wang

et al. 2017

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Wearable/flexible electronic sensing systems are considered to be one of the key technologies in the next generation of smart personal electronics. To realize personal portable devices with mobile electronics application, i.e., wearable electronic sensors that can work sustainably and continuously without an external power supply are highly desired. The recent progress and advantages of wearable self-powered electronic sensing systems for mobile or personal attachable health monitoring applications are presented. An overview of various types of wearable electronic sensors, including flexible tactile sensors, wearable image sensor array, biological and chemical sensor, temperature sensors, and multifunctional integrated sensing systems is provided. Self-powered sensing systems with integrated energy units are then discussed, separated as energy harvesting self-powered sensing systems, energy storage integrated sensing systems, and all-in-on integrated sensing systems. Finally, the future perspectives of self-powered sensing systems for wearable electronics are discussed.

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“…As typical representatives in the burgeoning field of nanoelectromechanical systems (NEMS), nanomechanical resonators [1,2,3] are expected to bring dramatical improvement to mass [4,5,6,7] pressure [8], acceleration [9] measurement and chemical/biological detections [10,11,12] due to their ultra-high sensitivity. Significantly, the mass sensitivity reached 10 −22 gHz −1/2 by using a 205 nm long carbon-nanotube (CNT) as a resonator [6].…”

Section: Introductionmentioning

confidence: 99%

Stress-Insensitive Resonant Graphene Mass Sensing via Frequency Ratio

Xing

Fan

et al. 2019

Sensors

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Herein, a peripherally clamped stretched square monolayer graphene sheet with a side length of 10 nm was demonstrated as a resonator for atomic-scale mass sensing via molecular dynamics (MD) simulation. Then, a novel method of mass determination using the first three resonant modes (mode11, mode21 and mode22) was developed to avoid the disturbance of stress fluctuation in graphene. MD simulation results indicate that improving the prestress in stretched graphene increases the sensitivity significantly. Unfortunately, it is difficult to determine the mass accurately by the stress-reliant fundamental frequency shift. However, the absorbed mass in the middle of graphene sheets decreases the resonant frequency of mode11 dramatically while having negligible effect on that of mode21 and mode22, which implies that the latter two frequency modes are appropriate for compensating the stress-induced frequency shift of mode11. Hence, the absorbed mass, with a resolution of 3.310−22 g, is found using the frequency ratio of mode11 to mode21 or mode22, despite the unstable prestress ranging from 32 GPa to 47 GPa. This stress insensitivity contributes to the applicability of the graphene-based resonant mass sensor in real applications.

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Fabrication of a graphene-based pressure sensor by utilising field emission behavior of carbon nanotubes

Cited by 33 publications

References 29 publications

Ultra-sensitive graphene sensor for measuring high vacuum pressure

Ultra-sensitive graphene sensor for measuring high vacuum pressure

Recent Progress of Self‐Powered Sensing Systems for Wearable Electronics

Stress-Insensitive Resonant Graphene Mass Sensing via Frequency Ratio

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