2016
DOI: 10.1364/oe.24.011611
|View full text |Cite
|
Sign up to set email alerts
|

Fabrication of a phase photon sieve on an optical fiber tip by focused ion beam nanomachining for improved fiber to silicon photonics waveguide light coupling

Abstract: PSS) as an alternative, more advantageous method to the metallization prior to FIB milling. The near field scans of the intensity profile along the optical axis under fiber illumination of a laser at λ = 1.55 μm are presented. We have analyzed the focusing properties and demonstrated the validity of our structure for light coupling into silicon photonics waveguides with improved efficiency and alignment tolerance.

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1
1

Citation Types

0
13
0

Year Published

2017
2017
2024
2024

Publication Types

Select...
8
1

Relationship

2
7

Authors

Journals

citations
Cited by 26 publications
(13 citation statements)
references
References 19 publications
0
13
0
Order By: Relevance
“…The first step of the fabrication process is the cleaving of the multimode graded index fibre tips (GIF625, Thorlabs), with a 62.5 μm core diameter and a numerical aperture of 0.275, which is then etched for 5 minutes in 9.6% HF gel, creating a shallow cavity in the fibre tip at an etch rate of 750 nm/min. The 9.6% HF buffered gel formulation, commonly used in dentistry as porcelain etchant gel, has a reduced etch rate compared to buffered hydrofluoric acid based etchants, providing better control of the etching depth and being at the same time safer to handle 25,26 .…”
Section: Fabrication Processmentioning
confidence: 99%
“…The first step of the fabrication process is the cleaving of the multimode graded index fibre tips (GIF625, Thorlabs), with a 62.5 μm core diameter and a numerical aperture of 0.275, which is then etched for 5 minutes in 9.6% HF gel, creating a shallow cavity in the fibre tip at an etch rate of 750 nm/min. The 9.6% HF buffered gel formulation, commonly used in dentistry as porcelain etchant gel, has a reduced etch rate compared to buffered hydrofluoric acid based etchants, providing better control of the etching depth and being at the same time safer to handle 25,26 .…”
Section: Fabrication Processmentioning
confidence: 99%
“…These can be responsible for blockage or absorption of the light, as addressed by Janeiro et al . 42 . In the particular case of the zone plates, the simulations have taken into account the dominant effect of the structure produced by the pattern on the fiber tip, but have left out second order corrections.…”
Section: Discussionmentioning
confidence: 99%
“…To address this challenge, several authors have proposed the use of distinct processes, such as: femtosecond pulsed laser micromachining 30, 31 , e-beam lithography 27 , focused ion beam milling 37–39 , among others 28, 40 . In this work, the fabrication of the Fresnel zone and phase plates is carried out using focused ion beam (FIB) milling 41, 42 .…”
Section: Introductionmentioning
confidence: 99%
“…In the microfabrication community, conductive polymers have long been used in electron-beam lithography (EBL) to enable ultra-high-resolution patterning on nonconductive substrates, and likewise can have similar benefits for FIB patterning (Dylewicz et al, 2011). Indeed, conductive polymers have been previously used to reduce the negative impacts of FIB charging during circuit edit, mask repair, and lithographic applications (Talbot & Trexler, 1994; Alias et al, 2015; Janeiro et al, 2016). This letter is the first report, however, extending their application to physical TEM lamella protection (to the authors’ knowledge).…”
Section: Methodsmentioning
confidence: 99%