Fabrication of a piezoelectric biosensor based on a PZN-PT/PMN-PT single crystal thin film

Abstract

In this paper, novel piezoelectric microbalance biosensors using single crystal lead zinc niobate-lead titanate (PZN-PT) and lead magnesium niobate-lead titanate (PMN-PT) are presented. The PZN-PT/ PMN-PT materials exhibit extremely high piezoelectric coefficients and other desirable properties for biosensors, supposed to be a superior substitution for the conventional quartz crystal with the improved performance. . These biosensors provide rapid and minute quantitative target detection by monitoring the change in resonance frequency of the crystal probe. With the geometrical variations, various prototypes are compared with conventional quartz crystal microbalances (QCM). The superiority of the materials over conventional quartz crystal is demonstrated experimentally in terms of sensitivity. In addition, we examine the feasibility of ultra miniaturization of the PZN-PT based biosensor by fabricating freestanding single crystal films of the PZN-PT and patterning micro-scale biosensors with ion milling and argon-ion laser-induced etching technique. A fabricated prototype sensor utilizing the material in a thin film form has a size of 300×100×7um 3 .

Relaxor-PT Single Crystal Piezoelectric Sensors

“…In addition, the PZN-PT film bio-sensor showed the smooth transient response with the percent change of 1.4%. Therefore, this work confirmed that proposed bio-chemical sensors composed of relaxor-PT single crystals have the superior sensitivity over conventional QCM due to the high piezoelectricity of single crystals [117].…”

“…The large strain accordingly induces large frequency shift of thickness-extensional or thickness-shear mode sensors [116]. Thus, an initial test using relaxor-PT single crystals as sensing materials was conducted by Hong et al [117] and the performance was compared with the commercial QCM. Sensing mechanism was similar to the QCM, but the large strain level (1.2%) of PMN-PT and PZN-PT single crystals was utilized.…”

A multisource energy harvesting utilizing highly efficient ferroelectric PMN-PT single crystal

“…Recently, Piezoelectric energy harvesting in Pb(Mg 1/3 Nb 2/3 )O 3 -PbTiO 3 (PMN-PT) single crystal has been successful in producing sufficient power for medical devices and micro-wireless sensor applications (Roundy & Wright., 2004, Hong et al, 2004, Radziemski & Lynn., 2004, Green, Mossi, & Bryant 2005, Badel et al, 2006, Ren et al, 2006, Kim et al, 2010, Leadbetter, Brown, & Adamson., 2013, Hwang et al, 2014, Kazys, Sliteris, & Sestoke, 2015. It has been possible due to the fact that the piezoelectric strain and electromechanical coupling coefficients of PMN-PT is higher than other piezoceramics such as PZT.…”

A PMMA coated PMN–PT single crystal resonator for sensing chemical agents

“…Highly sensitive miniaturized biochemical sensors continue to be in high demand for detection of chemical agents, biomarkers, and biological pathogens [1][2][3][4][5]. Advanced piezoelectric materials such as PMN-PT, which exceed the chemical vapor detection sensitivity of current technology based on QCM, show great promise for use in developing the next generation of biochemical sensors [6][7]. In a recent publication, we have demonstrated that a miniaturized PMN-PT sensor, even when nonfunctionalized, is an order of magnitude more sensitive to acetone vapors than a QCM [8].…”

“…Advanced piezoelectric materials such as PMN-PT, which exceed the chemical vapor detection sensitivity of current technology based on quartz crystal microbalance (QCM), show great promise for use in developing the next generation of biochemical sensors [6,7]. In a recent publication, we have demonstrated that a miniaturized PMN-PT sensor, even when non-functionalized, is an order of magnitude more sensitive to acetone vapors than a QCM [8].…”