Fabrication of an Adaptive Micro Fresnel Mirror Array

Bruno, Binal Poyyathuruthy; Grünwald, R.; Wallrabe, Ulrike

doi:10.1007/978-981-32-9632-9_4

Cited by 2 publications

(2 citation statements)

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“…An alternative approach consists in the direct small-angle phase shaping with new types of fast steerable, highly reflective micro-electro-mechanical systems (MEMS) that enable large phase elongations and high-power structured beam generation at pulse durations down to the few-cycle range. Both the well-established beam shaper concepts based on DMDs or low-dispersion phase-only liquid-crystal-on-silicon spatial light modulators (LCoS-SLMs) [27][28][29][30][31][32] and the shape-variant MEMS with piezo-or thermal actuation [33][34][35][36][37][38][39] exhibit specific advantages and drawbacks. Their combination, however, can be used to significantly improve system performance at ultrashort pulse durations and even to obtain new functionality.…”

Section: Introductionmentioning

confidence: 99%

High-Flexibility Control of Structured Light with Combined Adaptive Optical Systems

et al. 2022

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Combining the specific advantages of high-resolution liquid-crystal-on-silicon spatial light modulators (LCoS-SLMs) and reflective or refractive micro-electro-mechanical systems (MEMS) presents new prospects for the generation of structured light fields. In particular, adaptive self-apodization schemes can significantly reduce diffraction by low-loss spatial filtering. The concept enables one to realize low-dispersion shaping of nondiffracting femtosecond wavepackets and to temporally switch, modulate or deflect spatially structured beams. Adaptive diffraction management by structured illumination is demonstrated for piezo-based and thermally actuated axicons, spiral phase plates (SPPs) and Fresnel bi-mirrors. Improved non-collinear autocorrelation with angular-tunable Fresnel-bi-mirrors via self-apodized illumination and phase contrast of an SLM is proposed. An extension of the recently introduced nondiffractive Talbot effect to a tunable configuration by combining an SLM and a fluid lens is reported. Experimental results for hexagonal as well as orthogonal array beams are presented.

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Section: Introductionmentioning

confidence: 99%

High-Flexibility Control of Structured Light with Combined Adaptive Optical Systems

et al. 2022

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“…Resulting interference characteristics are essentially different. In [12], we have already reported on the initial fabrication and measurement results of the array. Here, the simulation and fabrication is further refined, and more detailed characterizations are done.…”

Section: Introductionmentioning

confidence: 99%

Micro Fresnel mirror array with individual mirror control

Bruno

Schütze

Grünwald

et al. 2020

Smart Mater. Struct.

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We present the design and fabrication of a miniaturized array of piezoelectrically actuated high speed Fresnel mirrors with individual mirror control. These Fresnel mirrors can be used to generate propagation invariant and self-healing interference patterns. The mirrors are actuated using piezobimorph actuators, and the consequent change of the tilting angle of the mirrors changes the fringe spacing of the interference pattern generated. The array consists of four Fresnel mirrors each having an area of 2x2 mm 2 arranged in a 2x2 configuration. The device, optimized using FEM simulations, is able to achieve maximum mirror deflections of 15 mrad, and has a resonance frequency of 28 kHz.

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Fabrication of an Adaptive Micro Fresnel Mirror Array

Cited by 2 publications

References 5 publications

High-Flexibility Control of Structured Light with Combined Adaptive Optical Systems

High-Flexibility Control of Structured Light with Combined Adaptive Optical Systems

Micro Fresnel mirror array with individual mirror control

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