Fabrication of Arrays of Lead Zirconate Titanate (PZT) Nanodots via Block Copolymer Self-Assembly

Abstract

Access to the full text of the published version may require a subscription. Rights KEYWORDS : PZT, Block copolymer, PFM, nanodot, piezoelectricABSTRACT: This article presents a simple methodology for the fabrication of two dimensional arrays of lead zirconate titanate (PZT) nanodots on n-doped Si substrates via the directed self-assembly of PS-b-PEO block copolymer templates. The approach produces highly ordered PZT nanodot patterns, with lateral widths and heights as small as 20 and 10 nm respectively, and a coverage density as high as ~ 68 × 10 9 nanodots cm -2 . The existence of a pervoskite phase in the nanodots was confirmed by X-ray diffraction and X-ray photoelectron spectroscopy. The piezo-amplitude and ferroelectric domain response obtained from the nanodots, through piezoresponse force microscopy, confirmed the presence of ferroelectricity in the PZT arrays. Notably, PZT nanodots with a thickness ~ 10 nm, which is close to the critical size limit of PZT, showed ferroelectric behavior. The presence of a multi-a/c domain structure in the nanodots was attributed to their polycrystalline nature.

Effects of A-site nonstoichiometry on oxide ion conduction in 0.94Bi0.5Na0.5TiO3–0.06BaTiO3 ceramics

“…Due to the similar ionic radii between Bi (r Bi 3þ ¼ 1:34 Å) 32 and Na (r Na þ ¼ 1:39 Å), 33 some excess Na could replace Bi and result in a negatively charged defect Na 00 Bi , thus leading to a further increase in compensating oxygen vacancies and/or holes as shown in Eq. (2). This would explain the degradation of the dielectric properties as seen in Fig.…”

“…1 Not only has it been used in both thin film and ceramic embodiments, but nanoscale structured PZT has also been investigated for use in ferroelectric memory applications. 2 However, environmental and health concerns regarding the toxicity of lead (Pb 2þ Þ has led to a restriction on its use in many electronic and electrical devices as seen in legislation in the European union 3 and other countries. [4][5][6] Therefore, a search for lead-free piezoelectric materials with comparable properties to that of PZT is a topic of significant current interest.…”

Strategies for Inorganic Incorporation using Neat Block Copolymer Thin Films for Etch Mask Function and Nanotechnological Application

“…[ 132 ] The pattern density was calculated to be ≈68 × 10 9 nanodots cm −2 . The ability to template functional material in this fashion with ferroelectric behavior may be of use for future memory devices due to reduced power consumption and faster write speeds than fl ash memory.…”

“…The inorganic features can be pattern transferred for high-aspect ratio structures showing their etch mask application, [ 127,134 ] with resulting Si features also used for biomedical application. [ 130 ] Moreover, inorganic features at substrate surfaces can be utilized to further efforts on magnetic, [ 126,129 ] ferroelectric, [ 132 ] anti-microbial, [ 133 ] and electrochemical detection [ 160 ] use in an easy and low cost manner.…”

Large Local‐Compressive Stress‐Induced Improvements in Piezoelectric Characteristics of Lead Zirconate Titanate Thin Films on a Ni Nanodots Array

“…[1][2][3][4] Lead zirconate titanate (Pb(Zr,Ti)O 3 ; PZT) is still one of the most important piezoelectric materials because of its superior piezoelectric properties compared to those of other Pb-free candidate materials. [5][6][7][8][9][10] The manipulation of domain configuration is one of the most important challenges in research because ideal PZT/Ir/TiW/Ni nanodots/SiO 2 /Si. [5][6][7][8][9][10] The manipulation of domain configuration is one of the most important challenges in research because ideal PZT/Ir/TiW/Ni nanodots/SiO 2 /Si.…”