Fabrication of aspheric optics: process challenges arising from a wide range of customer demands and diversity of machine technologies

Bielke, Andreas; Beckstette, K.; Kuebler, C. W.; Lasser, Holger; Mullany, Brigid; Pöllmann, Michael Peter; Wang, Hexin

doi:10.1117/12.531892

Cited by 10 publications

(4 citation statements)

References 4 publications

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“…According to the previous research results, the surface form accuracy of each DUV lens should be 2 nm rms; and the MSFR error should be 0.3 nm rms [51][52][53][54][55][56]. As the diameter of an atom is 0.1-0.2 nm, the atoms on the surface need to be removed layer by layer if the size fluctuation range of the machined surface is in the subnanometer order, which is the ultimate target processing accuracy, namely, atomic-level accuracy.…”

Section: State-of-the-art Precision Levelmentioning

confidence: 95%

Manufacturing technologies toward extreme precision

Zhang

Yan

Kuriyagawa

2019

Int. J. Extrem. Manuf.

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Precision is one of the most important aspects of manufacturing. High precision creates high quality, high performance, exchangeability, reliability, and added value for industrial products. Over the past decades, remarkable advances have been achieved in the area of high-precision manufacturing technologies, where the form accuracy approaches the nanometer level and surface roughness the atomic level. These extremely high precision manufacturing technologies enable the development of high-performance optical elements, semiconductor substrates, biomedical parts, and so on, thereby enhancing the ability of human beings to explore the macro- and microscopic mysteries and potentialities of the natural world. In this paper, state-of-the-art high-precision material removal manufacturing technologies, especially ultraprecision cutting, grinding, deterministic form correction polishing, and supersmooth polishing, are reviewed and compared with insights into their principles, methodologies, and applications. The key issues in extreme precision manufacturing that should be considered for future R&D are discussed.

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Section: State-of-the-art Precision Levelmentioning

confidence: 95%

Manufacturing technologies toward extreme precision

Zhang

Yan

Kuriyagawa

2019

Int. J. Extrem. Manuf.

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“…Over the past half century, various Computer Controlled Optical Surfacing (CCOS) technologies have been widely and successfully adopted for manufacturing optics from small-size optical lenses to large reflective mirrors [1][2][3][4][5][6]. With the help of deterministic polishing technology, common optical components could basically meet people's requirements for realizing excellent imaging quality [7][8].…”

Section: Introductionmentioning

confidence: 99%

Multi-tool sub-aperture polishing high-slope asphere with low mid-spatial frequency errors

Zhang

Wang

2014

SPIE Proceedings

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The reasons and methods for generating and suppressing mid-spatial frequency (MSF) errors were deeply studied, and a new method of combining multiple small tools was used to smooth out MSF errors. First, an elastic tool was employed to pre-polish the aspheric surface after grinding, aiming at fast removing sub-surface damage as well as correcting surface figure. Then a second tool-self-designed smoothing tool -was mainly used to smooth the surface, which was followed by an air bonnet tool to continue figure correction until Zernike residual was not convergent. The effective combination of the three small tools was not only able to avoid the high slope fabrication difficulty of the aspheric surface, but also to suppress the MSF errors. The surface was tested by CGH, which can ensure the accuracy of the surface. This method was successfully used to polish a 150mm asphere with a maximum departure of 0.26mm. After five iterations, the surface accuracy converged to 4.05nm RMS. The result shows that this method can realize the valid polishing of high-accuracy aspheric surface.

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“…Fabrication of lenses or lens moulds relies on mechanical processing such as grinding and machining, followed by polishing of the optical surfaces (Roeder, Guenther, & Zimmermann, 2019). The demand for high-quality surfaces requires specialized and expensive equipment, and the fabrication of non-standard optical surfaces remains challenging (Bielke et al, 2004; Roeder et al, 2019). It is natural to consider three-dimensional (3-D) printing technologies as a potential platform for lens prototyping, yet thus far, the quality of prints is inadequate for optical applications (Heinrich & Rank, 2018), and complex post-processing is needed in order to achieve the required surface quality (Vaidya & Solgaard, 2018).…”

Section: Introductionmentioning

confidence: 99%