Fabrication of buried microfluidic channels with observation windows using femtosecond laser photoablation and parylene-C coating

Gablech, Imrich; Somer, Jakub; Fohlerová, Zdenka; Svatoš, Vojtěch; Pekárek, J; Kurdík, Stanislav; Feng, Jianguo; Fecko, Peter; Podešva, Pavel; Hubálek, Jaromír; Neužil, Pavel

doi:10.1007/s10404-018-2125-6

Cited by 5 publications

(2 citation statements)

References 23 publications

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“…We designed the chip layout with a size of (6 × 27) mm 2 using the Nanolithography toolbox software 31 with the aim of having all fluid/optics inputs/outputs at the chip sidewalls to provide a robust solution. The layout consisted of ≈30 µm-wide lines subsequently forming buried microchannels by a process similar to earlier ones that used two parylene-C depositions 32 . The first parylene-C was employed as a mask with conformal coating on the sidewalls and a second parylene-C layer to seal the created channels 33 .…”

Section: Methodsmentioning

confidence: 99%

Rapid Characterization of Biomolecules’ Thermal Stability in a Segmented Flow-Through Optofluidic Microsystem

Fohlerová

Zhu

Hubálek

et al. 2020

Sci Rep

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Optofluidic devices combining optics and microfluidics have recently attracted attention for biomolecular analysis due to their high detection sensitivity. Here, we show a silicon chip with tubular microchannels buried inside the substrate featuring temperature gradient (∇T) along the microchannel. We set up an optical fluorescence system consisting of a power-modulated laser light source of 470 nm coupled to the microchannel serving as a light guide via optical fiber. Fluorescence was detected on the other side of the microchannel using a photomultiplier tube connected to an optical fiber via a fluorescein isothiocyanate filter. The PMT output was connected to a lock-in amplifier for signal processing. We performed a melting curve analysis of a short dsDNA-SYBR Green I complex with a known melting temperature (T M) in a flow-through configuration without gradient to verify the functionality of the proposed detection system. We then used the segmented flow configuration and measured the fluorescence amplitude of a droplet exposed to ∇T of ≈ 2.31 °C mm −1 , determining the heat transfer time as ≈ 554 ms. The proposed platform can be used as a fast and cost-effective system for performing either MCA of dsDNAs or for measuring protein unfolding for drug-screening applications.

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Section: Methodsmentioning

confidence: 99%

Rapid Characterization of Biomolecules’ Thermal Stability in a Segmented Flow-Through Optofluidic Microsystem

Fohlerová

Zhu

Hubálek

et al. 2020

Sci Rep

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“…Researchers have also proposed an advanced method for manufacturing microfluidic structures comprising of channels and inputs/outputs buried within a silicon substrate based on single-level lithography. Thus, they created an observation window within an opaque silicon substrate for observing the flow state within the channels [55], as shown in Figure 4(c,f). Cheng's group used simultaneous spatiotemporal focusing to fabricate 3D microchannels on thick quartz glass, which is a method that avoids the problem of nonlinear self-focusing encountered in the case of conventional focusing methods.…”

Section: E Manufacturing and Applications Of Microfluidic Chipsmentioning

confidence: 99%

Recent Advances in Femtosecond Laser Fabrication: From Structures to Applications

Wen¹,

Yu²,

Zhang³

et al. 2021

IEEE Open J. Nanotechnol.

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Femtosecond laser processing is fast becoming a pervasive method for fabricating micro/nanostructures because it can be used to produce micro/nanostructures on myriads of materials with high precision and resolution, requires little control over environmental conditions, and is simple to implement. Here, we review recent developments in the use of femtosecond lasers for the fabrication of micro/nanostructures through ablation and two-photon polymerization (TPP). Moreover, the applications of some of the fabricated micro/nanostructures are also discussed. We highlight the advantages of femtosecond laser processing by explaining the underlying principles of laser ablation and TPP. We also show the use of this method to fabricate new devices with outstanding performance in several application realm, such as sensors, optical devices, microfluidic chips, and soft robotics.

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Fabrication of the microfluidic channels in silicon wafers using isotropic wet etching method: the impact of the composition of HNA solution on etching

Dewangan,

Purohit,

Sahu

et al. 2024

Microsyst Technol

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Fabrication of buried microfluidic channels with observation windows using femtosecond laser photoablation and parylene-C coating

Cited by 5 publications

References 23 publications

Rapid Characterization of Biomolecules’ Thermal Stability in a Segmented Flow-Through Optofluidic Microsystem

Rapid Characterization of Biomolecules’ Thermal Stability in a Segmented Flow-Through Optofluidic Microsystem

Recent Advances in Femtosecond Laser Fabrication: From Structures to Applications

Fabrication of the microfluidic channels in silicon wafers using isotropic wet etching method: the impact of the composition of HNA solution on etching

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