2015
DOI: 10.1007/s11664-015-4294-3
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Fabrication of Carrier-Doped Si Nanoarchitecture for Thermoelectric Material by Ultrathin SiO2 Film Technique

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Cited by 14 publications
(8 citation statements)
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“…Also, previous study showed that Ga atoms decreased the thermal conductivity of solid-phase epitaxy Si layer by acting as phonon scatters. 31 By contrast; in our study the Al atoms played a totally different role in a-Si. Al atoms increased the thermal conductivity of a-Si thin lms by increasing the number of phonons with long MFPs.…”
Section: Resultscontrasting
confidence: 73%
“…Also, previous study showed that Ga atoms decreased the thermal conductivity of solid-phase epitaxy Si layer by acting as phonon scatters. 31 By contrast; in our study the Al atoms played a totally different role in a-Si. Al atoms increased the thermal conductivity of a-Si thin lms by increasing the number of phonons with long MFPs.…”
Section: Resultscontrasting
confidence: 73%
“…Electrical resistances of doped stacked structures were confirmed to be much larger than that of Au film electrodes. The details of 2ω method were described in our previous papers 17 19 27 .…”
Section: Methodsmentioning
confidence: 99%
“…Clean Si(111) surfaces were obtained by flashing at 1250 °C after outgassing at 500 °C for about 6 h. These clean surfaces were oxidized at 600 °C for 10 min at an oxygen pressure of 2 × 10 −4 Pa to form 0.3-nm-thick SiO 2 films (ultrathin SiO 2 films). 26,32,33) Twenty five monolayers (MLs) of Ge were deposited onto the ultrathin SiO 2 films at 600 °C to form Ge nuclei of ∼20 nm in lateral size at an areal density of 1 × 10 11 cm −2 . These experimental details were reported elsewhere.…”
Section: Methodsmentioning
confidence: 99%