2001
DOI: 10.1088/0268-1242/16/3/311
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Fabrication of conducting GeSi/Si micro- and nanotubes and helical microcoils

Abstract: Conducting micro-and nanotubes and free-standing flexible helical microcoils have been fabricated from strained Ge x Si 1−x /Si heterolayers. The fabrication technique was based on self-rolling of a thin highly strained epitaxial Ge x Si 1−x /Si bifilm detached from the substrate by selective etching of a sacrificial layer in a roll-shaped tube. The obtained tube diameters varied from 10 nm to 13 µm, depending on the thickness and lattice mismatch of the GeSi/Si bilayer. GeSi/Si tubes and helical coils, up to … Show more

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Cited by 172 publications
(133 citation statements)
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“…), including nanotubes aligned horizontally on the substrate, were developed in [13][14][15]. Effective physical properties of such films essentially depend on their structure and on the residual stress.…”
mentioning
confidence: 99%
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“…), including nanotubes aligned horizontally on the substrate, were developed in [13][14][15]. Effective physical properties of such films essentially depend on their structure and on the residual stress.…”
mentioning
confidence: 99%
“…For the tubes, finite elements corresponding to a piezoelastic material were employed. The calculations were performed for materials commonly used in fabrication of substrates and nanotubes [13][14][15]. The properties of the materials were borrowed from [19,20].…”
mentioning
confidence: 99%
“…), and various substrate bonding conditions. We consider the same materials of the substrate and the nanotubes used in [15,21]. The properties of these materials are taken from [8], and the geometrical parameters are taken from [15,21].…”
Section: On the Modeling Of Natural Oscillations Of An Array Of Nanoomentioning
confidence: 99%
“…We consider the same materials of the substrate and the nanotubes used in [15,21]. The properties of these materials are taken from [8], and the geometrical parameters are taken from [15,21]. The calculations show that for any bonding of the substrate, it is possible to choose the problem parameters in such a way that the natural frequencies of the nanotubes and the substrate can be extracted from the general spectrum of the large system.…”
Section: On the Modeling Of Natural Oscillations Of An Array Of Nanoomentioning
confidence: 99%
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