Fabrication of dielectric hollow submicrometric pipes

Abstract

Articles you may be interested inFerromagnetic resonance in a single crystal of iron borate and magnetic field tuning of hybrid oscillations in a composite structure with a dielectric: Experiment and theory A planar x-ray waveguide with a tunable air gap for the structural investigation of confined fluids Rev.A simple technique to obtain an array of hollow submicrometric titanium oxide pipes is described. Initially, a submicrometric structure is formed in a positive photoresist by holographic exposure, followed by the deposition of the titanium oxide film and the removal of the photoresist by an appropriate solvent. These structures may be useful as waveguides for x-ray and neutron capillary optics.

Fabrication of micro/nano fluidic channels with sacrificial galvanic coupled metals

“…Most of the current sacrificial techniques can only achieve one or the other. Photoresists have been used as a high etching rate sacrificial material [18,19]. This method is very straightforward and does not have complicated processes such as deposition and pattern transfer.…”

Liquid-Phase Infiltration (LPI) Process for the Fabrication of Highly Nano-Ordered Materials

“…1,2 Extensive studies involving various chemical and physical techniques have recently led to the development of advanced materials having structures with periodicity on the nanometer scale. [3][4][5][6][7][8][9][10][11][12][13][14] Using these periodic structures as templates, well-ordered structures were prepared through templating techniques. Template methods using colloidal crystals such as silica or polystyrene provide a simple and effective route for fabricating 3D well-ordered materials.…”

“…Two- (2D) and three-dimensionally (3D) ordered nanomaterials have attracted much interest due to their potential applications, for example, in photonics, in electronics, and as nano-mechanics. Periodically nano-ordered structures should impart interesting photonic properties to films composed of photonic crystals, above and beyond the intrinsic luminescent and piezoelectric properties of the materials. , Extensive studies involving various chemical and physical techniques have recently led to the development of advanced materials having structures with periodicity on the nanometer scale. − Using these periodic structures as templates, well-ordered structures were prepared through templating techniques. Template methods using colloidal crystals such as silica or polystyrene provide a simple and effective route for fabricating 3D well-ordered materials. − Filling these templates with high-refractive-index materials such as TiO 2 and subsequently removing the template yields inverse opal structures. ,− 2D well-ordered materials are fabricated through infiltration of semiconductor or organic molds having evenly spaced holes. − However, in the fabrication of highly structured materials, infiltrating the templates sometimes results in incomplete filling because of the presence of voids and seam.…”

Stable TiO[sub x] Submicrometer Channels

“…In a previous work, 9 the patterning of stable, hollow submicrometric structures in titanium oxide films deposited by plasmaenhanced chemical vapor deposition ͑PECVD͒ was described. The production of submicrometer, stable channels of radio frequency ͑rf͒ sputtered titanium oxide films with different stoichiometries is described in this work.…”